The Prandtl micro flow sensor (PMFS)

A novel silicon diaphragm capacitive sensor for flow-velocity measurement

Oliver Berberig, Kay Nottmeyer, Jun Mizuno, Yoshitaka Kanai, Takashi Kobayashi

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

This paper presents the setup, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well-known classical Prandtl tube [1], it realizes flow-velocity detection by measurement of the pressure difference between the stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a silicon diaphragm suspended boss, which serves as the counter electrode of an integrated capacitor that is directly exposed to the fluid to be measured. The main parameters influencing the sensor operation are discussed, including conclusions resulting from a CFD simulation of the flow around a tilted sensor. Results of wind-tunnel experiments confirm the sensor's operation principle.

Original languageEnglish
Pages (from-to)93-98
Number of pages6
JournalSensors and Actuators, A: Physical
Volume66
Issue number1-3
Publication statusPublished - 1998 Apr 1
Externally publishedYes

Fingerprint

Capacitive sensors
diaphragms
Silicon
Flow measurement
Diaphragms
velocity measurement
Flow velocity
Velocity measurement
flow velocity
sensors
Sensors
silicon
fluid pressure
static pressure
wind tunnels
pressure sensors
charge flow devices
Fluids
deflection
capacitors

Keywords

  • Capacitive sensors
  • Flow velocity
  • Prandtl tube

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

The Prandtl micro flow sensor (PMFS) : A novel silicon diaphragm capacitive sensor for flow-velocity measurement. / Berberig, Oliver; Nottmeyer, Kay; Mizuno, Jun; Kanai, Yoshitaka; Kobayashi, Takashi.

In: Sensors and Actuators, A: Physical, Vol. 66, No. 1-3, 01.04.1998, p. 93-98.

Research output: Contribution to journalArticle

Berberig, Oliver ; Nottmeyer, Kay ; Mizuno, Jun ; Kanai, Yoshitaka ; Kobayashi, Takashi. / The Prandtl micro flow sensor (PMFS) : A novel silicon diaphragm capacitive sensor for flow-velocity measurement. In: Sensors and Actuators, A: Physical. 1998 ; Vol. 66, No. 1-3. pp. 93-98.
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