Abstract
This paper presents the setup, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well-known classical Prandtl tube [1], it realizes flow-velocity detection by measurement of the pressure difference between the stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a silicon diaphragm suspended boss, which serves as the counter electrode of an integrated capacitor that is directly exposed to the fluid to be measured. The main parameters influencing the sensor operation are discussed, including conclusions resulting from a CFD simulation of the flow around a tilted sensor. Results of wind-tunnel experiments confirm the sensor's operation principle.
| Original language | English |
|---|---|
| Pages (from-to) | 93-98 |
| Number of pages | 6 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 66 |
| Issue number | 1-3 |
| Publication status | Published - 1998 Apr 1 |
| Externally published | Yes |
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Keywords
- Capacitive sensors
- Flow velocity
- Prandtl tube
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Instrumentation
Cite this
The Prandtl micro flow sensor (PMFS) : A novel silicon diaphragm capacitive sensor for flow-velocity measurement. / Berberig, Oliver; Nottmeyer, Kay; Mizuno, Jun; Kanai, Yoshitaka; Kobayashi, Takashi.
In: Sensors and Actuators, A: Physical, Vol. 66, No. 1-3, 01.04.1998, p. 93-98.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - The Prandtl micro flow sensor (PMFS)
T2 - A novel silicon diaphragm capacitive sensor for flow-velocity measurement
AU - Berberig, Oliver
AU - Nottmeyer, Kay
AU - Mizuno, Jun
AU - Kanai, Yoshitaka
AU - Kobayashi, Takashi
PY - 1998/4/1
Y1 - 1998/4/1
N2 - This paper presents the setup, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well-known classical Prandtl tube [1], it realizes flow-velocity detection by measurement of the pressure difference between the stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a silicon diaphragm suspended boss, which serves as the counter electrode of an integrated capacitor that is directly exposed to the fluid to be measured. The main parameters influencing the sensor operation are discussed, including conclusions resulting from a CFD simulation of the flow around a tilted sensor. Results of wind-tunnel experiments confirm the sensor's operation principle.
AB - This paper presents the setup, operation principle, and fabrication process of a novel type of flow-velocity sensor. Like the well-known classical Prandtl tube [1], it realizes flow-velocity detection by measurement of the pressure difference between the stagnant fluid pressure in front of the sensor and static pressure in the flow around the sensor. This difference results in a deflection of a silicon diaphragm suspended boss, which serves as the counter electrode of an integrated capacitor that is directly exposed to the fluid to be measured. The main parameters influencing the sensor operation are discussed, including conclusions resulting from a CFD simulation of the flow around a tilted sensor. Results of wind-tunnel experiments confirm the sensor's operation principle.
KW - Capacitive sensors
KW - Flow velocity
KW - Prandtl tube
UR - http://www.scopus.com/inward/record.url?scp=0032049424&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0032049424&partnerID=8YFLogxK
M3 - Article
VL - 66
SP - 93
EP - 98
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
SN - 0924-4247
IS - 1-3
ER -