The role of ion-induced segregation on the surface damage of alloys during sputtering at elevated temperatures

H. Shimizu, Shingo Ichimura, H. Murakami, H. Agari

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Surface ion damage was studied for Cu/Ni, Au/Cu, Ag/Cu, Co/Ni, and Fe/Ni alloys during noble gas ion bombardment at elevated temperatures. Tests were also made for a coarse-grained Cu/Ni alloy at liquid nitrogen temperature. Results related to the effect of surface segregation on (a) the angular distribution of the sputtered atoms, and (b) the grain boundary erosion are presented. It was found that the segregated atoms have a tendency to be sputtered preferentially in the direction of the target surface for the case of Cu/Ni, and Co/Ni alloy at elevated temperatures. Such a tendency was observed for the sputtering of Cu/Ni alloy even at 100 K. However, it was not observed for Au/Cu, Ag/Cu, although the segregation phenomena were drastically observed. After sputtering of the Cu/Ni alloys at 873 K, the grain boundaries were no longer straight and some had developed zigzag shapes 2-3 μm in width. The cross section of the specimen showed the existence of large voids of 20-30 μm in depth and 3-5 μm in width just beneath the eroded grain boundaries, presumably due to the ion induced Kirkendall effect (IKE) .

Original languageEnglish
Pages (from-to)408-411
Number of pages4
JournalJournal of Nuclear Materials
Volume145-147
Issue numberC
DOIs
Publication statusPublished - 1987 Feb 2
Externally publishedYes

Fingerprint

Sputtering
sputtering
Ions
damage
Grain boundaries
grain boundaries
ions
tendencies
Temperature
temperature
Kirkendall effect
Noble Gases
Surface segregation
Atoms
Angular distribution
Liquid nitrogen
Ion bombardment
Inert gases
liquid nitrogen
erosion

Keywords

  • alloys
  • ion induced segregation
  • sputtering

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Materials Science(all)
  • Nuclear Energy and Engineering

Cite this

The role of ion-induced segregation on the surface damage of alloys during sputtering at elevated temperatures. / Shimizu, H.; Ichimura, Shingo; Murakami, H.; Agari, H.

In: Journal of Nuclear Materials, Vol. 145-147, No. C, 02.02.1987, p. 408-411.

Research output: Contribution to journalArticle

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