The synthesis of diamond films at lower pressure and lower temperature using magneto-microwave plasma CVD

Jun Ichi Suzuki; Hiroshi Kawarada; King Sheng Mar; Jin Wei; Yoshihiro Yokota; Akio Hiraki

doi:10.1143/JJAP.28.L281

The synthesis of diamond films at lower pressure and lower temperature using magneto-microwave plasma CVD

Jun Ichi Suzuki, Hiroshi Kawarada, King Sheng Mar, Jin Wei, Yoshihiro Yokota, Akio Hiraki

Research output: Contribution to journal › Article › peer-review

54 Citations (Scopus)

Abstract

Diamond films have been obtained using magneto-microwave plasma assisted CVD at 0.1 Torr. The reaction gas is a CO/H₂ mixture. By setting the ECR condition at the deposition area, a high density plasma (1×10¹¹ cm^-3) is obtained around the substrate. The discharge area is quite uniform in the pressure. Diamond films are obtained on positively biased substrates. As the reaction pressure becomes lower, the substrate temperature for the diamond formation tends to decrease. The films were evaluated by SEM imaging, electron diffraction and Raman spectroscopy.

Original language	English
Pages (from-to)	L281-L283
Journal	Japanese journal of applied physics
Volume	28
Issue number	2 A
DOIs	https://doi.org/10.1143/JJAP.28.L281
Publication status	Published - 1989 Feb
Externally published	Yes

Keywords

CVD
Crystal growth
Diamond film
ECR
Microwave plasma

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.28.L281

Cite this

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title = "The synthesis of diamond films at lower pressure and lower temperature using magneto-microwave plasma CVD",

abstract = "Diamond films have been obtained using magneto-microwave plasma assisted CVD at 0.1 Torr. The reaction gas is a CO/H2 mixture. By setting the ECR condition at the deposition area, a high density plasma (1×1011 cm-3) is obtained around the substrate. The discharge area is quite uniform in the pressure. Diamond films are obtained on positively biased substrates. As the reaction pressure becomes lower, the substrate temperature for the diamond formation tends to decrease. The films were evaluated by SEM imaging, electron diffraction and Raman spectroscopy.",

keywords = "CVD, Crystal growth, Diamond film, ECR, Microwave plasma",

author = "Suzuki, {Jun Ichi} and Hiroshi Kawarada and Mar, {King Sheng} and Jin Wei and Yoshihiro Yokota and Akio Hiraki",

year = "1989",

month = feb,

doi = "10.1143/JJAP.28.L281",

language = "English",

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T1 - The synthesis of diamond films at lower pressure and lower temperature using magneto-microwave plasma CVD

AU - Suzuki, Jun Ichi

AU - Kawarada, Hiroshi

AU - Mar, King Sheng

AU - Wei, Jin

AU - Yokota, Yoshihiro

AU - Hiraki, Akio

PY - 1989/2

Y1 - 1989/2

N2 - Diamond films have been obtained using magneto-microwave plasma assisted CVD at 0.1 Torr. The reaction gas is a CO/H2 mixture. By setting the ECR condition at the deposition area, a high density plasma (1×1011 cm-3) is obtained around the substrate. The discharge area is quite uniform in the pressure. Diamond films are obtained on positively biased substrates. As the reaction pressure becomes lower, the substrate temperature for the diamond formation tends to decrease. The films were evaluated by SEM imaging, electron diffraction and Raman spectroscopy.

AB - Diamond films have been obtained using magneto-microwave plasma assisted CVD at 0.1 Torr. The reaction gas is a CO/H2 mixture. By setting the ECR condition at the deposition area, a high density plasma (1×1011 cm-3) is obtained around the substrate. The discharge area is quite uniform in the pressure. Diamond films are obtained on positively biased substrates. As the reaction pressure becomes lower, the substrate temperature for the diamond formation tends to decrease. The films were evaluated by SEM imaging, electron diffraction and Raman spectroscopy.

KW - CVD

KW - Crystal growth

KW - Diamond film

KW - ECR

KW - Microwave plasma

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 2 A

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The synthesis of diamond films at lower pressure and lower temperature using magneto-microwave plasma CVD

Abstract

Keywords

ASJC Scopus subject areas

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