Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE

Akinobu Kobayashi, Akihiro Oshima, Satoshi Okubo, Hidehiro Tsubokura, Tomohiro Takahashi, Tomoko Gowa Oyama, Seiichi Tagawa, Masakazu Washio

    Research output: Contribution to journalArticle

    2 Citations (Scopus)

    Abstract

    Nano-/micro-fabrication process of crosslinked poly(tetrafluoroethylene) (RX-PTFE) is proposed as a novel method using combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). Nano- and micro-scale patterns of silicon wafers fabricated by EB lithography were used as the molds for TRaf process. Poly(tetrafluoroethylene) (PTFE) dispersion was dropped on the fabricated molds, and then PTFE was crosslinked with doses from 105 kGy to 1500 kGy in its molten state at 340 °C in nitrogen atmosphere. The obtained nano- and micro-structures by TRaf process were compared with those by the conventional thermal fabrication process. Average surface roughness (Ra) of obtained structures was evaluated with atomic force microscope (AFM) and scanning electron microscope (SEM). Ra of obtained structures with the crosslinking dose of 600 kGy showed less than 1.2 nm. The fine nano-/micro-structures of crosslinked PTFE were successfully obtained by TRaf process.

    Original languageEnglish
    Pages (from-to)76-80
    Number of pages5
    JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
    Volume295
    DOIs
    Publication statusPublished - 2013

    Fingerprint

    polytetrafluoroethylene
    Microfabrication
    Polytetrafluoroethylenes
    Radiation
    fabrication
    radiation
    Molds
    Fabrication
    dosage
    microstructure
    Microstructure
    crosslinking
    Silicon wafers
    Crosslinking
    Lithography
    Hot Temperature
    Molten materials
    surface roughness
    Microscopes
    Electron microscopes

    Keywords

    • Electron beam
    • Mold
    • Nano-/micro-fabrication
    • RX-PTFE
    • TRaf process

    ASJC Scopus subject areas

    • Instrumentation
    • Nuclear and High Energy Physics

    Cite this

    Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE. / Kobayashi, Akinobu; Oshima, Akihiro; Okubo, Satoshi; Tsubokura, Hidehiro; Takahashi, Tomohiro; Oyama, Tomoko Gowa; Tagawa, Seiichi; Washio, Masakazu.

    In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 295, 2013, p. 76-80.

    Research output: Contribution to journalArticle

    Kobayashi, Akinobu ; Oshima, Akihiro ; Okubo, Satoshi ; Tsubokura, Hidehiro ; Takahashi, Tomohiro ; Oyama, Tomoko Gowa ; Tagawa, Seiichi ; Washio, Masakazu. / Thermal and radiation process for nano-/micro-fabrication of crosslinked PTFE. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2013 ; Vol. 295. pp. 76-80.
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    AU - Takahashi, Tomohiro

    AU - Oyama, Tomoko Gowa

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