Thermal conductivity of amorphous indium-gallium-zinc oxide thin films

Toru Yoshikawa, Takashi Yagi, Nobuto Oka, Junjun Jia, Yuichiro Yamashita, Koichiro Hattori, Yutaka Seino, Naoyuki Taketoshi, Tetsuya Baba, Yuzo Shigesato

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

We investigated the thermal conductivity of 200-nm-thick amorphous indium-gallium-zinc-oxide (a-IGZO) films. Films with a chemical composition of In : Ga : Zn = 1 : 1 : 0:6 were prepared by dc magnetron sputtering using an IGZO ceramic target and an Ar-O2 sputtering gas. The carrier density of the films was systematically controlled from 1014 to > 10 19 cm-3 by varying the O2 flow ratio. Their Hall mobility was slightly higher than 10 cm2.V-1.s -1. Those films were sandwiched between 100-nm-thick Mo layers; their thermal diffusivity, measured by a pulsed light heating thermoreflectance technique, was ∼5.4 × 10-7 m2.s-1 and was almost independent of the carrier density. The average thermal conductivity was 1.4W.m-1.K-1.

Original languageEnglish
Article number021101
JournalApplied Physics Express
Volume6
Issue number2
DOIs
Publication statusPublished - 2013 Feb 1
Externally publishedYes

Fingerprint

gallium oxides
Gallium
Zinc oxide
zinc oxides
Indium
Oxide films
indium
Thermal conductivity
thermal conductivity
Thin films
Carrier concentration
thin films
Hall mobility
Thermal diffusivity
thermal diffusivity
Magnetron sputtering
Sputtering
oxide films
magnetron sputtering
chemical composition

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Yoshikawa, T., Yagi, T., Oka, N., Jia, J., Yamashita, Y., Hattori, K., ... Shigesato, Y. (2013). Thermal conductivity of amorphous indium-gallium-zinc oxide thin films. Applied Physics Express, 6(2), [021101]. https://doi.org/10.7567/APEX.6.021101

Thermal conductivity of amorphous indium-gallium-zinc oxide thin films. / Yoshikawa, Toru; Yagi, Takashi; Oka, Nobuto; Jia, Junjun; Yamashita, Yuichiro; Hattori, Koichiro; Seino, Yutaka; Taketoshi, Naoyuki; Baba, Tetsuya; Shigesato, Yuzo.

In: Applied Physics Express, Vol. 6, No. 2, 021101, 01.02.2013.

Research output: Contribution to journalArticle

Yoshikawa, T, Yagi, T, Oka, N, Jia, J, Yamashita, Y, Hattori, K, Seino, Y, Taketoshi, N, Baba, T & Shigesato, Y 2013, 'Thermal conductivity of amorphous indium-gallium-zinc oxide thin films', Applied Physics Express, vol. 6, no. 2, 021101. https://doi.org/10.7567/APEX.6.021101
Yoshikawa T, Yagi T, Oka N, Jia J, Yamashita Y, Hattori K et al. Thermal conductivity of amorphous indium-gallium-zinc oxide thin films. Applied Physics Express. 2013 Feb 1;6(2). 021101. https://doi.org/10.7567/APEX.6.021101
Yoshikawa, Toru ; Yagi, Takashi ; Oka, Nobuto ; Jia, Junjun ; Yamashita, Yuichiro ; Hattori, Koichiro ; Seino, Yutaka ; Taketoshi, Naoyuki ; Baba, Tetsuya ; Shigesato, Yuzo. / Thermal conductivity of amorphous indium-gallium-zinc oxide thin films. In: Applied Physics Express. 2013 ; Vol. 6, No. 2.
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