Thermo-resistive platinum thin film hydrogen gas sensor fabricated by MEMS techniques

Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda

    Research output: Contribution to journalArticle

    5 Citations (Scopus)

    Abstract

    Thermo-resistive platinum(Pt) thin film sensor was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. The sensor was fabricated with lift-off process that allowed the dual sensing surface area. Furthermore, the dual sensing surfaces ensured faster response to hydrogen gas. To increase the catalytic reaction comparing with at the room temperature, the sensor was heated to a specified temperature by applying the current to a Pt thin film. The catalytic reaction took place when the heated sensor came into the contact with hydrogen. Additionally, the differential Pt thin film hydrogen gas sensor was also developed. This gas sensor was able to compensate the changes in the external environment such as temperature, moisture, etc. The fabricated hydrogen sensor detected the concentration of hydrogen gas in air from 2% to 9%.

    Original languageEnglish
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume128
    Issue number9
    DOIs
    Publication statusPublished - 2008

    Fingerprint

    Chemical sensors
    Platinum
    Thin films
    Hydrogen
    Sensors
    Resistors
    Temperature
    Gases
    Moisture
    Fabrication
    Air

    Keywords

    • Hydrogen gas sensor
    • Lift-off process
    • MEMS
    • Platinum thin film

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering

    Cite this

    Thermo-resistive platinum thin film hydrogen gas sensor fabricated by MEMS techniques. / Yamazaki, Daisuke; Zhang, Lin; Pawlat, Joanna; Ueda, Toshitsugu.

    In: IEEJ Transactions on Sensors and Micromachines, Vol. 128, No. 9, 2008.

    Research output: Contribution to journalArticle

    Yamazaki, Daisuke ; Zhang, Lin ; Pawlat, Joanna ; Ueda, Toshitsugu. / Thermo-resistive platinum thin film hydrogen gas sensor fabricated by MEMS techniques. In: IEEJ Transactions on Sensors and Micromachines. 2008 ; Vol. 128, No. 9.
    @article{8a5664c5c7b8468aab478a38d848b222,
    title = "Thermo-resistive platinum thin film hydrogen gas sensor fabricated by MEMS techniques",
    abstract = "Thermo-resistive platinum(Pt) thin film sensor was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. The sensor was fabricated with lift-off process that allowed the dual sensing surface area. Furthermore, the dual sensing surfaces ensured faster response to hydrogen gas. To increase the catalytic reaction comparing with at the room temperature, the sensor was heated to a specified temperature by applying the current to a Pt thin film. The catalytic reaction took place when the heated sensor came into the contact with hydrogen. Additionally, the differential Pt thin film hydrogen gas sensor was also developed. This gas sensor was able to compensate the changes in the external environment such as temperature, moisture, etc. The fabricated hydrogen sensor detected the concentration of hydrogen gas in air from 2{\%} to 9{\%}.",
    keywords = "Hydrogen gas sensor, Lift-off process, MEMS, Platinum thin film",
    author = "Daisuke Yamazaki and Lin Zhang and Joanna Pawlat and Toshitsugu Ueda",
    year = "2008",
    doi = "10.1541/ieejsmas.128.347",
    language = "English",
    volume = "128",
    journal = "IEEJ Transactions on Sensors and Micromachines",
    issn = "1341-8939",
    publisher = "The Institute of Electrical Engineers of Japan",
    number = "9",

    }

    TY - JOUR

    T1 - Thermo-resistive platinum thin film hydrogen gas sensor fabricated by MEMS techniques

    AU - Yamazaki, Daisuke

    AU - Zhang, Lin

    AU - Pawlat, Joanna

    AU - Ueda, Toshitsugu

    PY - 2008

    Y1 - 2008

    N2 - Thermo-resistive platinum(Pt) thin film sensor was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. The sensor was fabricated with lift-off process that allowed the dual sensing surface area. Furthermore, the dual sensing surfaces ensured faster response to hydrogen gas. To increase the catalytic reaction comparing with at the room temperature, the sensor was heated to a specified temperature by applying the current to a Pt thin film. The catalytic reaction took place when the heated sensor came into the contact with hydrogen. Additionally, the differential Pt thin film hydrogen gas sensor was also developed. This gas sensor was able to compensate the changes in the external environment such as temperature, moisture, etc. The fabricated hydrogen sensor detected the concentration of hydrogen gas in air from 2% to 9%.

    AB - Thermo-resistive platinum(Pt) thin film sensor was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. The sensor was fabricated with lift-off process that allowed the dual sensing surface area. Furthermore, the dual sensing surfaces ensured faster response to hydrogen gas. To increase the catalytic reaction comparing with at the room temperature, the sensor was heated to a specified temperature by applying the current to a Pt thin film. The catalytic reaction took place when the heated sensor came into the contact with hydrogen. Additionally, the differential Pt thin film hydrogen gas sensor was also developed. This gas sensor was able to compensate the changes in the external environment such as temperature, moisture, etc. The fabricated hydrogen sensor detected the concentration of hydrogen gas in air from 2% to 9%.

    KW - Hydrogen gas sensor

    KW - Lift-off process

    KW - MEMS

    KW - Platinum thin film

    UR - http://www.scopus.com/inward/record.url?scp=73849115330&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=73849115330&partnerID=8YFLogxK

    U2 - 10.1541/ieejsmas.128.347

    DO - 10.1541/ieejsmas.128.347

    M3 - Article

    AN - SCOPUS:73849115330

    VL - 128

    JO - IEEJ Transactions on Sensors and Micromachines

    JF - IEEJ Transactions on Sensors and Micromachines

    SN - 1341-8939

    IS - 9

    ER -