Thermo-resistive platinum thin film hydrogen gas sensor fabricated by MEMS techniques

Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda

    Research output: Contribution to journalArticle

    5 Citations (Scopus)

    Abstract

    Thermo-resistive platinum(Pt) thin film sensor was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. The sensor was fabricated with lift-off process that allowed the dual sensing surface area. Furthermore, the dual sensing surfaces ensured faster response to hydrogen gas. To increase the catalytic reaction comparing with at the room temperature, the sensor was heated to a specified temperature by applying the current to a Pt thin film. The catalytic reaction took place when the heated sensor came into the contact with hydrogen. Additionally, the differential Pt thin film hydrogen gas sensor was also developed. This gas sensor was able to compensate the changes in the external environment such as temperature, moisture, etc. The fabricated hydrogen sensor detected the concentration of hydrogen gas in air from 2% to 9%.

    Original languageEnglish
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume128
    Issue number9
    DOIs
    Publication statusPublished - 2008

    Keywords

    • Hydrogen gas sensor
    • Lift-off process
    • MEMS
    • Platinum thin film

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering

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