Thick ScAlN film for high efficient ultrasonic transducer in low frequency of 81 MHz

Ko Hei Sano, Rei Karasawa, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Large piezoelectricity in 43% Sc doped ScAlN thin film has been recently reported. The thickness extensional mode resonant frequency, where ultrasonic generation efficiency become large, is inversely proportional to the thickness of films. Bulk ScAlN thick plates are attractive for the low frequency and high power ultrasonic applications such as actuators and medical ultrasonics because ScAlN possess lower mechanical and dielectric losses compared with well-used PZT. The thick ScAlN films, however, has not been reported. The electromechanical coupling coefficient kt2 was determined to be 19% using the thickness extensional mode at 81 MHz. This frequency is extremely low compared to well-reported ScAlN thin films in the GHz ranges.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages862-865
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

Keywords

  • ScAlN
  • thick piezoelectric film
  • ultrasonic transducers

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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