Thickness shear mode epitaxial (10-12) LiNbO3(11-20) AZO/(10-12) Al2O3BAW resonator

Shinya Kudo*, Takahiko Yanagitani

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

LiNbO3 have been used for the SAW filters because of their high Q and k. However, LiNbO3 films have not used in the BAW industry because thickness extensional mode kt2 in the c-axis oriented LiNbO3 films, which can be grown in the standard sputtering process, is significantly low compared with quasi-shear mode k352 in the 168° Ycut LiNbO3. Therefore, the mechanical thinning of bulk LiNbO3 single crystal plate has been used to fabricate the thin single crystalline layer for BAW resonators. In this study, we demonstrate the epitaxial growth of (10-12) LiNbO3 on epitaxial (11-20) Al doped conductive ZnO layer (AZO)/(10-12) Al2O3 substrate. Thickness shear mode acoustic properties of the resonator were reported.

Original languageEnglish
Title of host publicationIEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages52-55
Number of pages4
ISBN (Electronic)9781665468312
DOIs
Publication statusPublished - 2022
Event1st IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022 - Munich, Germany
Duration: 2022 Jul 182022 Jul 20

Publication series

NameIEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022

Conference

Conference1st IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022
Country/TerritoryGermany
CityMunich
Period22/7/1822/7/20

Keywords

  • BAW
  • Epitaxial
  • LiNbO3
  • shear mode

ASJC Scopus subject areas

  • Computational Mechanics
  • Electrical and Electronic Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials
  • Acoustics and Ultrasonics

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