Thin film free-standing PEDOT: PSS/SU8 bilayer microactuators

S. Taccola, F. Greco, B. Mazzolai, V. Mattoli, E. W H Jager

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

Several smart active materials have been proposed and tested for the development of microactuators. Among these, conjugated polymers are of great interest because miniaturization improves their electrochemical properties, such as increasing the speed and stress output of microactuators, with respect to large-scale actuators. Recently we developed a novel fabrication process to obtain robust free-standing conductive ultra-thin films made of the conjugated polymer poly(3, 4-ethylenedioxythiophene) doped with the polyanion poly(styrenesulfonate) (PEDOT:PSS). These conductive free-standing nanofilms, with thicknesses ranging between a few tens to several hundreds of nm, allow the realisation of new all polymer microactuators using facile microfabrication methods. Here, we report a novel processing method for manufacturing all polymer electrochemical microactuators. We fabricated and patterned free-standing PEDOT:PSS/SU8 bilayer microactuators in the form of microfingers of a variety of lengths using adapted microfabrication procedures. By imposing electrochemical oxidation/reduction cycles on the PEDOT:PSS we were able to demonstrate reversible actuation of the microactuators resulting in bending of the microfingers. A number of possible applications can be envisaged for these small, soft actuators, such as microrobotics and cell manipulation.

Original languageEnglish
Article number117004
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number11
DOIs
Publication statusPublished - 2013 Nov
Externally publishedYes

Fingerprint

Microactuators
Thin films
Microfabrication
Conjugated polymers
Polymers
Actuators
Conductive films
Ultrathin films
Electrochemical oxidation
Electrochemical properties
poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate)
Fabrication
Processing

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

Cite this

Thin film free-standing PEDOT : PSS/SU8 bilayer microactuators. / Taccola, S.; Greco, F.; Mazzolai, B.; Mattoli, V.; Jager, E. W H.

In: Journal of Micromechanics and Microengineering, Vol. 23, No. 11, 117004, 11.2013.

Research output: Contribution to journalArticle

Taccola, S. ; Greco, F. ; Mazzolai, B. ; Mattoli, V. ; Jager, E. W H. / Thin film free-standing PEDOT : PSS/SU8 bilayer microactuators. In: Journal of Micromechanics and Microengineering. 2013 ; Vol. 23, No. 11.
@article{f0a07e10f8a7438f8aa80b35fd305f1a,
title = "Thin film free-standing PEDOT: PSS/SU8 bilayer microactuators",
abstract = "Several smart active materials have been proposed and tested for the development of microactuators. Among these, conjugated polymers are of great interest because miniaturization improves their electrochemical properties, such as increasing the speed and stress output of microactuators, with respect to large-scale actuators. Recently we developed a novel fabrication process to obtain robust free-standing conductive ultra-thin films made of the conjugated polymer poly(3, 4-ethylenedioxythiophene) doped with the polyanion poly(styrenesulfonate) (PEDOT:PSS). These conductive free-standing nanofilms, with thicknesses ranging between a few tens to several hundreds of nm, allow the realisation of new all polymer microactuators using facile microfabrication methods. Here, we report a novel processing method for manufacturing all polymer electrochemical microactuators. We fabricated and patterned free-standing PEDOT:PSS/SU8 bilayer microactuators in the form of microfingers of a variety of lengths using adapted microfabrication procedures. By imposing electrochemical oxidation/reduction cycles on the PEDOT:PSS we were able to demonstrate reversible actuation of the microactuators resulting in bending of the microfingers. A number of possible applications can be envisaged for these small, soft actuators, such as microrobotics and cell manipulation.",
author = "S. Taccola and F. Greco and B. Mazzolai and V. Mattoli and Jager, {E. W H}",
year = "2013",
month = "11",
doi = "10.1088/0960-1317/23/11/117004",
language = "English",
volume = "23",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "11",

}

TY - JOUR

T1 - Thin film free-standing PEDOT

T2 - PSS/SU8 bilayer microactuators

AU - Taccola, S.

AU - Greco, F.

AU - Mazzolai, B.

AU - Mattoli, V.

AU - Jager, E. W H

PY - 2013/11

Y1 - 2013/11

N2 - Several smart active materials have been proposed and tested for the development of microactuators. Among these, conjugated polymers are of great interest because miniaturization improves their electrochemical properties, such as increasing the speed and stress output of microactuators, with respect to large-scale actuators. Recently we developed a novel fabrication process to obtain robust free-standing conductive ultra-thin films made of the conjugated polymer poly(3, 4-ethylenedioxythiophene) doped with the polyanion poly(styrenesulfonate) (PEDOT:PSS). These conductive free-standing nanofilms, with thicknesses ranging between a few tens to several hundreds of nm, allow the realisation of new all polymer microactuators using facile microfabrication methods. Here, we report a novel processing method for manufacturing all polymer electrochemical microactuators. We fabricated and patterned free-standing PEDOT:PSS/SU8 bilayer microactuators in the form of microfingers of a variety of lengths using adapted microfabrication procedures. By imposing electrochemical oxidation/reduction cycles on the PEDOT:PSS we were able to demonstrate reversible actuation of the microactuators resulting in bending of the microfingers. A number of possible applications can be envisaged for these small, soft actuators, such as microrobotics and cell manipulation.

AB - Several smart active materials have been proposed and tested for the development of microactuators. Among these, conjugated polymers are of great interest because miniaturization improves their electrochemical properties, such as increasing the speed and stress output of microactuators, with respect to large-scale actuators. Recently we developed a novel fabrication process to obtain robust free-standing conductive ultra-thin films made of the conjugated polymer poly(3, 4-ethylenedioxythiophene) doped with the polyanion poly(styrenesulfonate) (PEDOT:PSS). These conductive free-standing nanofilms, with thicknesses ranging between a few tens to several hundreds of nm, allow the realisation of new all polymer microactuators using facile microfabrication methods. Here, we report a novel processing method for manufacturing all polymer electrochemical microactuators. We fabricated and patterned free-standing PEDOT:PSS/SU8 bilayer microactuators in the form of microfingers of a variety of lengths using adapted microfabrication procedures. By imposing electrochemical oxidation/reduction cycles on the PEDOT:PSS we were able to demonstrate reversible actuation of the microactuators resulting in bending of the microfingers. A number of possible applications can be envisaged for these small, soft actuators, such as microrobotics and cell manipulation.

UR - http://www.scopus.com/inward/record.url?scp=84887125319&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84887125319&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/23/11/117004

DO - 10.1088/0960-1317/23/11/117004

M3 - Article

AN - SCOPUS:84887125319

VL - 23

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 11

M1 - 117004

ER -