Time-of-Flight secondary ion mass spectrometry (TOF-SIMS) using the metal-cluster-complex primary ion of Ir4(CO)7 +

Yukio Fujiwara, Naoaki Saito, Hidehiko Nonaka, Atsushi Suzuki, Taisuke Nakanaga, Toshiyuki Fujimoto, Akira Kurokawa, Shingo Ichimura

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

An orthogonal acceleration Time-of-Flight Secondary Ion Mass Spectrometer (TOF-SIMS) system has been developed with a metal-cluster-complex ion source. The ion source can produce ion beams of massive molecules called metal-cluster-complexes such as Ir4(CO)12, which has a molecular weight higher than 1000 u. Using the system, TOF-SIMS of a contaminated silicon substrate and a room temperature molten salt (i.e. an ionic liquid) was performed. The ionic liquid N,N-diethyl-N-methyl-N-(2-methoxyethyl) ammonium bis(trifluoromethanesulfonyl)imide, which has a molecular weight of 426 u, consists of a polyatomic cation, [C8H20ON] +, and a polyatomic anion, [C2F6NO 4S2]-. During SIMS analysis, an analytical sample was bombarded with a continuous primary ion beam of either Ir 4(CO)7 + or Ar+ in a beam energy of 10 keV at an incident angle of 45°. It was confirmed that the use of Ir 4(CO)7 + ions enhanced secondary ion intensity compared with that of Ar+ ions. Also, experimental results showed that the bombardment of Ir4(CO)7 + caused less fragmentation. In the case of the ionic liquid, cation-attached ionic-liquid molecules were observed in addition to the cation of the ionic liquid.

Original languageEnglish
Pages (from-to)245-248
Number of pages4
JournalSurface and Interface Analysis
Volume43
Issue number1-2
DOIs
Publication statusPublished - 2011 Jan 1
Externally publishedYes

Fingerprint

Ionic Liquids
metal clusters
Carbon Monoxide
Secondary ion mass spectrometry
Ionic liquids
secondary ion mass spectrometry
Metals
Ions
Cations
liquids
Positive ions
Ion sources
ions
cations
ion sources
Ion beams
mass spectrometers
molecular weight
Molecular weight
ion beams

Keywords

  • cluster SIMS
  • ion beam
  • ionic liquid
  • Ir (CO)
  • Ir(CO)
  • metal-cluster-complex
  • orthogonal
  • SIMS
  • sputtering
  • TOF

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Time-of-Flight secondary ion mass spectrometry (TOF-SIMS) using the metal-cluster-complex primary ion of Ir4(CO)7 + . / Fujiwara, Yukio; Saito, Naoaki; Nonaka, Hidehiko; Suzuki, Atsushi; Nakanaga, Taisuke; Fujimoto, Toshiyuki; Kurokawa, Akira; Ichimura, Shingo.

In: Surface and Interface Analysis, Vol. 43, No. 1-2, 01.01.2011, p. 245-248.

Research output: Contribution to journalArticle

Fujiwara, Yukio ; Saito, Naoaki ; Nonaka, Hidehiko ; Suzuki, Atsushi ; Nakanaga, Taisuke ; Fujimoto, Toshiyuki ; Kurokawa, Akira ; Ichimura, Shingo. / Time-of-Flight secondary ion mass spectrometry (TOF-SIMS) using the metal-cluster-complex primary ion of Ir4(CO)7 + In: Surface and Interface Analysis. 2011 ; Vol. 43, No. 1-2. pp. 245-248.
@article{3ab00ca892f2438e93cb3fee5dab7396,
title = "Time-of-Flight secondary ion mass spectrometry (TOF-SIMS) using the metal-cluster-complex primary ion of Ir4(CO)7 +",
abstract = "An orthogonal acceleration Time-of-Flight Secondary Ion Mass Spectrometer (TOF-SIMS) system has been developed with a metal-cluster-complex ion source. The ion source can produce ion beams of massive molecules called metal-cluster-complexes such as Ir4(CO)12, which has a molecular weight higher than 1000 u. Using the system, TOF-SIMS of a contaminated silicon substrate and a room temperature molten salt (i.e. an ionic liquid) was performed. The ionic liquid N,N-diethyl-N-methyl-N-(2-methoxyethyl) ammonium bis(trifluoromethanesulfonyl)imide, which has a molecular weight of 426 u, consists of a polyatomic cation, [C8H20ON] +, and a polyatomic anion, [C2F6NO 4S2]-. During SIMS analysis, an analytical sample was bombarded with a continuous primary ion beam of either Ir 4(CO)7 + or Ar+ in a beam energy of 10 keV at an incident angle of 45°. It was confirmed that the use of Ir 4(CO)7 + ions enhanced secondary ion intensity compared with that of Ar+ ions. Also, experimental results showed that the bombardment of Ir4(CO)7 + caused less fragmentation. In the case of the ionic liquid, cation-attached ionic-liquid molecules were observed in addition to the cation of the ionic liquid.",
keywords = "cluster SIMS, ion beam, ionic liquid, Ir (CO), Ir(CO), metal-cluster-complex, orthogonal, SIMS, sputtering, TOF",
author = "Yukio Fujiwara and Naoaki Saito and Hidehiko Nonaka and Atsushi Suzuki and Taisuke Nakanaga and Toshiyuki Fujimoto and Akira Kurokawa and Shingo Ichimura",
year = "2011",
month = "1",
day = "1",
doi = "10.1002/sia.3435",
language = "English",
volume = "43",
pages = "245--248",
journal = "Surface and Interface Analysis",
issn = "0142-2421",
publisher = "John Wiley and Sons Ltd",
number = "1-2",

}

TY - JOUR

T1 - Time-of-Flight secondary ion mass spectrometry (TOF-SIMS) using the metal-cluster-complex primary ion of Ir4(CO)7 +

AU - Fujiwara, Yukio

AU - Saito, Naoaki

AU - Nonaka, Hidehiko

AU - Suzuki, Atsushi

AU - Nakanaga, Taisuke

AU - Fujimoto, Toshiyuki

AU - Kurokawa, Akira

AU - Ichimura, Shingo

PY - 2011/1/1

Y1 - 2011/1/1

N2 - An orthogonal acceleration Time-of-Flight Secondary Ion Mass Spectrometer (TOF-SIMS) system has been developed with a metal-cluster-complex ion source. The ion source can produce ion beams of massive molecules called metal-cluster-complexes such as Ir4(CO)12, which has a molecular weight higher than 1000 u. Using the system, TOF-SIMS of a contaminated silicon substrate and a room temperature molten salt (i.e. an ionic liquid) was performed. The ionic liquid N,N-diethyl-N-methyl-N-(2-methoxyethyl) ammonium bis(trifluoromethanesulfonyl)imide, which has a molecular weight of 426 u, consists of a polyatomic cation, [C8H20ON] +, and a polyatomic anion, [C2F6NO 4S2]-. During SIMS analysis, an analytical sample was bombarded with a continuous primary ion beam of either Ir 4(CO)7 + or Ar+ in a beam energy of 10 keV at an incident angle of 45°. It was confirmed that the use of Ir 4(CO)7 + ions enhanced secondary ion intensity compared with that of Ar+ ions. Also, experimental results showed that the bombardment of Ir4(CO)7 + caused less fragmentation. In the case of the ionic liquid, cation-attached ionic-liquid molecules were observed in addition to the cation of the ionic liquid.

AB - An orthogonal acceleration Time-of-Flight Secondary Ion Mass Spectrometer (TOF-SIMS) system has been developed with a metal-cluster-complex ion source. The ion source can produce ion beams of massive molecules called metal-cluster-complexes such as Ir4(CO)12, which has a molecular weight higher than 1000 u. Using the system, TOF-SIMS of a contaminated silicon substrate and a room temperature molten salt (i.e. an ionic liquid) was performed. The ionic liquid N,N-diethyl-N-methyl-N-(2-methoxyethyl) ammonium bis(trifluoromethanesulfonyl)imide, which has a molecular weight of 426 u, consists of a polyatomic cation, [C8H20ON] +, and a polyatomic anion, [C2F6NO 4S2]-. During SIMS analysis, an analytical sample was bombarded with a continuous primary ion beam of either Ir 4(CO)7 + or Ar+ in a beam energy of 10 keV at an incident angle of 45°. It was confirmed that the use of Ir 4(CO)7 + ions enhanced secondary ion intensity compared with that of Ar+ ions. Also, experimental results showed that the bombardment of Ir4(CO)7 + caused less fragmentation. In the case of the ionic liquid, cation-attached ionic-liquid molecules were observed in addition to the cation of the ionic liquid.

KW - cluster SIMS

KW - ion beam

KW - ionic liquid

KW - Ir (CO)

KW - Ir(CO)

KW - metal-cluster-complex

KW - orthogonal

KW - SIMS

KW - sputtering

KW - TOF

UR - http://www.scopus.com/inward/record.url?scp=78951477711&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78951477711&partnerID=8YFLogxK

U2 - 10.1002/sia.3435

DO - 10.1002/sia.3435

M3 - Article

AN - SCOPUS:78951477711

VL - 43

SP - 245

EP - 248

JO - Surface and Interface Analysis

JF - Surface and Interface Analysis

SN - 0142-2421

IS - 1-2

ER -