Tip characterizer for atomic force microscopy

Hiroshi Itoh, Toshiyuki Fujimoto, Shingo Ichimura

Research output: Contribution to journalArticlepeer-review

58 Citations (Scopus)

Abstract

A tip characterizer for atomic force microscopy (AFM) was developed based on the fabrication of multilayer thin films. Comb-shaped line and space (LS) and wedge-shaped knife-edge structures were fabricated on a GaAs substrate. GaAsInGaP superlattices were used to control the width of the structures precisely, and selective chemical etching was used to form sharp edges on the nanostructures. The minimum size of the LS structure was designed to be 10 nm, and the radius of the knife edge was less than 5 nm. These nanostructures were used as a well-defined tip characterizer to measure the shape of a tip on a cantilever from line profiles of AFM images.

Original languageEnglish
Article number103704
JournalReview of Scientific Instruments
Volume77
Issue number10
DOIs
Publication statusPublished - 2006 Nov 7
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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