Transparent crosslinked PTFE mold fabrication and nano-/micro-pattern transfer to photo-curable resin

Akinobu Kobayashi, Tomoko Gowa Oyama, Akihiro Oshima, Seiichi Tagawa, Masakazu Washio

    Research output: Contribution to journalArticle

    Abstract

    Nano-/micro-scale structures of transparent crosslinked polytetrafluoroethylene (RX-PTFE) mold have been fabricated by combined process which is thermal and radiation process for fabrication of RX-PTFE (TRaf process). The nano-/micro-fabricated RX-PTFE were attempted to be applied for the transparent polymer molds of UV nanoimprint lithography (NIL). The ability of the RX-PTFE mold for UV-NIL was evaluated by the imprinted patterns. The RX-PTFE molds and the imprinted structures obtained by UV-NIL were observed by a field emission scanning electron microscope (FE-SEM). As a result, imprinted structures of photo-curable resin (Trimethylolpropane-triacrylate: TMPTA) by UV-NIL using RX-PTFE mold were successfully obtained. The nano-scale L&S patterns, square (410 nm × 410 nm) and hole (Φ{phonetic} 170 nm) array patterns were clearly obtained.

    Original languageEnglish
    Pages (from-to)217-221
    Number of pages5
    JournalJournal of Photopolymer Science and Technology
    Volume25
    Issue number2
    DOIs
    Publication statusPublished - 2012

    Fingerprint

    Polytetrafluoroethylene
    Polytetrafluoroethylenes
    Resins
    Nanoimprint lithography
    Fabrication
    Molds
    Speech analysis
    Field emission
    Polymers
    Electron microscopes
    Scanning
    Radiation

    Keywords

    • Crosslinked PTFE
    • TRaf process
    • Transparent polymer mold
    • UV-NIL

    ASJC Scopus subject areas

    • Materials Chemistry
    • Polymers and Plastics
    • Organic Chemistry

    Cite this

    Transparent crosslinked PTFE mold fabrication and nano-/micro-pattern transfer to photo-curable resin. / Kobayashi, Akinobu; Oyama, Tomoko Gowa; Oshima, Akihiro; Tagawa, Seiichi; Washio, Masakazu.

    In: Journal of Photopolymer Science and Technology, Vol. 25, No. 2, 2012, p. 217-221.

    Research output: Contribution to journalArticle

    Kobayashi, Akinobu ; Oyama, Tomoko Gowa ; Oshima, Akihiro ; Tagawa, Seiichi ; Washio, Masakazu. / Transparent crosslinked PTFE mold fabrication and nano-/micro-pattern transfer to photo-curable resin. In: Journal of Photopolymer Science and Technology. 2012 ; Vol. 25, No. 2. pp. 217-221.
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    AU - Tagawa, Seiichi

    AU - Washio, Masakazu

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