Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion

Yuichiro Aoyama; Nguyen Binh-Khiem; Kentaro Noda; Yusuke Takei; Tetsuo Kan; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2010.5442332

Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion

Yuichiro Aoyama^*, Nguyen Binh-Khiem, Kentaro Noda, Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing tip and the sidewalls of the two sensing beams. We confirmed that our device was able to measure triaxial forces. The displacement sensitivities of the device were 1.59×10^-3 μm^-1, 1.18×10^-3 μm^-1 and 3.26×10^-4 μm^-1 for x, y, and z-direction, respectively.

Original language	English
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	619-622
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442332
Publication status	Published - 2010 Jun 1
Externally published	Yes
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: 2010 Jan 24 → 2010 Jan 28

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	10/1/24 → 10/1/28

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2010.5442332

Cite this

Aoyama, Y., Binh-Khiem, N., Noda, K., Takei, Y., Kan, T., Iwase, E., Matsumoto, K., & Shimoyama, I. (2010). Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 619-622). [5442332] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442332

Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. / Aoyama, Yuichiro; Binh-Khiem, Nguyen; Noda, Kentaro et al.

MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 619-622 5442332 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Aoyama, Y, Binh-Khiem, N, Noda, K, Takei, Y, Kan, T, Iwase, E, Matsumoto, K & Shimoyama, I 2010, Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442332, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 619-622, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 10/1/24. https://doi.org/10.1109/MEMSYS.2010.5442332

Aoyama Y, Binh-Khiem N, Noda K, Takei Y, Kan T, Iwase E et al. Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 619-622. 5442332. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2010.5442332

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abstract = "We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing tip and the sidewalls of the two sensing beams. We confirmed that our device was able to measure triaxial forces. The displacement sensitivities of the device were 1.59×10-3 μm-1, 1.18×10-3 μm-1 and 3.26×10-4 μm-1 for x, y, and z-direction, respectively.",

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AU - Kan, Tetsuo

AU - Iwase, Eiji

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

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AB - We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing tip and the sidewalls of the two sensing beams. We confirmed that our device was able to measure triaxial forces. The displacement sensitivities of the device were 1.59×10-3 μm-1, 1.18×10-3 μm-1 and 3.26×10-4 μm-1 for x, y, and z-direction, respectively.

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Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion

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