Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion

Yuichiro Aoyama, Nguyen Binh-Khiem, Kentaro Noda, Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing tip and the sidewalls of the two sensing beams. We confirmed that our device was able to measure triaxial forces. The displacement sensitivities of the device were 1.59×10-3 μm-1, 1.18×10-3 μm-1 and 3.26×10-4 μm-1 for x, y, and z-direction, respectively.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages619-622
Number of pages4
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong
Duration: 2010 Jan 242010 Jan 28

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CityHong Kong
Period10/1/2410/1/28

Fingerprint

Thermal diffusion
Force measurement
thermal diffusion
Electric wiring
Doping (additives)
Mechanical properties
wiring
stimuli
mechanical properties
Direction compound
sensitivity
cells

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Aoyama, Y., Binh-Khiem, N., Noda, K., Takei, Y., Kan, T., Iwase, E., ... Shimoyama, I. (2010). Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 619-622). [5442332] https://doi.org/10.1109/MEMSYS.2010.5442332

Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. / Aoyama, Yuichiro; Binh-Khiem, Nguyen; Noda, Kentaro; Takei, Yusuke; Kan, Tetsuo; Iwase, Eiji; Matsumoto, Kiyoshi; Shimoyama, Isao.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2010. p. 619-622 5442332.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aoyama, Y, Binh-Khiem, N, Noda, K, Takei, Y, Kan, T, Iwase, E, Matsumoto, K & Shimoyama, I 2010, Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 5442332, pp. 619-622, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, 10/1/24. https://doi.org/10.1109/MEMSYS.2010.5442332
Aoyama Y, Binh-Khiem N, Noda K, Takei Y, Kan T, Iwase E et al. Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2010. p. 619-622. 5442332 https://doi.org/10.1109/MEMSYS.2010.5442332
Aoyama, Yuichiro ; Binh-Khiem, Nguyen ; Noda, Kentaro ; Takei, Yusuke ; Kan, Tetsuo ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2010. pp. 619-622
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