Tribological behavior of diamond-like carbon produced by rf-PCVD based on energetic evaluation

Shuji Yamamoto, Atsuo Kawana, Chitoshi Masuda

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Two types of diamond-like carbon (DLC) were evaluated for their tribological behavior in terms of the tribometer input energy. The DLC samples were prepared from methane (denoted DLC[CH4]) or benzene (denoted DLC[C6H6]) as a gas source on tungsten-carbide (WC) substrates by radio-frequency plasma chemical vapor deposition (rf-PCVD). The hydrogen contents of the DLCs were measured by Elastic Recoil Detection Analysis (ERDA). The DLC structures were investigated by Raman spectrometry and X-ray photoelectron spectroscopy (XPS). The basic mechanical properties, such as the hardness and the Young's modulus, were obtained by a nano-indenter. The DLC films against alumina were tribo-tested by a ball-on-disk. The input energy was calculated using the applied load, the friction coefficient, and the sliding distance in each tribo-test. The wear behavior of the DLC[CH4] sample was better than that of the DLC[C6H6], even though the hardness of DLC[CH4] was lower than that of DLC[C6H6]. The wear loss of DLC[CH4] and DLC[C6H6] was evaluated by the input energy, and the wear resistance difference of the DLCs was characterized in terms of the input energy.

Original languageEnglish
Pages (from-to)457-464
Number of pages8
JournalSurface and Coatings Technology
Volume236
DOIs
Publication statusPublished - 2013 Dec 15

Fingerprint

Diamond
Chemical vapor deposition
Diamonds
radio frequencies
Carbon
diamonds
vapor deposition
Plasmas
evaluation
carbon
Hardness
Wear of materials
hardness
Diamond like carbon films
Aluminum Oxide
Tungsten carbide
tribometers
Methane
tungsten carbides
energy

Keywords

  • Diamond-like carbon
  • Hydrogen contents
  • Input energy
  • Wear loss

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Tribological behavior of diamond-like carbon produced by rf-PCVD based on energetic evaluation. / Yamamoto, Shuji; Kawana, Atsuo; Masuda, Chitoshi.

In: Surface and Coatings Technology, Vol. 236, 15.12.2013, p. 457-464.

Research output: Contribution to journalArticle

Yamamoto, Shuji ; Kawana, Atsuo ; Masuda, Chitoshi. / Tribological behavior of diamond-like carbon produced by rf-PCVD based on energetic evaluation. In: Surface and Coatings Technology. 2013 ; Vol. 236. pp. 457-464.
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