A tunneling acoustic microscope is a new type of microscope which is based on both a scanning tunneling microscope and a technique for detecting acoustic waves. It enables simultaneous detection of force interactions between tip and sample and tunneling current. Using this new microscope, defects on silicon surface induced by thermal oxidation have been observed by detecting changes in surface conductivity with high spatial resolutions.
- Piezoelectric transducer
- Scanning tunneling microscope
- Thermal oxidation
- Tunneling acoustic microscope
ASJC Scopus subject areas
- Physics and Astronomy(all)