Ultrahigh efficiency III-V on Si MOS capacitor optical modulator

T. Hiraki*, T. Aihara, K. Hasebe, T. Fujii, K. Takeda, T. Tsuchizawa, Takaaki Kakitsuka, H. Fukuda, S. Matsuo

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


A high-efficiency and low-loss Mach-Zehnder modulator on a Si platform is a key component for meeting the demand for high-capacity, low-cost and low-power optical transceivers in future optical fiber links. We report a III-V/Si MOS capacitor Mach-Zehnder modulator with an ultrahigh-efficiency phase shifter, which consists of n-type InGaAsP and ptype Si. The main advantage of this structure is a large electron-induced refractive index change and low free-carrier absorption loss of the n-type InGaAsP. The heterogeneously integrated InGaAsP/Si MOS capacitor structure is fabricated by using the oxygen plasma assisted bonding method. The fabricated device shows VπL of 0.09 Vcm, a value over three-times smaller than that of the conventional Si MOS capacitor Mach-Zehnder modulator, without an increase in the insertion loss. This clearly indicates that the proposed III-V/Si MOS capacitor Mach-Zehnder modulator overcomes the performance limit of the Si Mach-Zehnder modulator.

Original languageEnglish
Title of host publicationSilicon Photonics
Subtitle of host publicationFrom Fundamental Research to Manufacturing
EditorsLaurent Vivien, Peter O'Brien, Roel G. Baets
ISBN (Print)9781510618985
Publication statusPublished - 2018 Jan 1
Externally publishedYes
EventSilicon Photonics: From Fundamental Research to Manufacturing 2018 - Strasbourg, France
Duration: 2018 Apr 232018 Apr 26

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceSilicon Photonics: From Fundamental Research to Manufacturing 2018


  • Mach-Zehnder modulator
  • Si photonics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Ultrahigh efficiency III-V on Si MOS capacitor optical modulator'. Together they form a unique fingerprint.

Cite this