Ultrahigh efficiency III-V on Si MOS capacitor optical modulator

T. Hiraki, T. Aihara, K. Hasebe, T. Fujii, K. Takeda, T. Tsuchizawa, Takaaki Kakitsuka, H. Fukuda, S. Matsuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A high-efficiency and low-loss Mach-Zehnder modulator on a Si platform is a key component for meeting the demand for high-capacity, low-cost and low-power optical transceivers in future optical fiber links. We report a III-V/Si MOS capacitor Mach-Zehnder modulator with an ultrahigh-efficiency phase shifter, which consists of n-type InGaAsP and ptype Si. The main advantage of this structure is a large electron-induced refractive index change and low free-carrier absorption loss of the n-type InGaAsP. The heterogeneously integrated InGaAsP/Si MOS capacitor structure is fabricated by using the oxygen plasma assisted bonding method. The fabricated device shows VπL of 0.09 Vcm, a value over three-times smaller than that of the conventional Si MOS capacitor Mach-Zehnder modulator, without an increase in the insertion loss. This clearly indicates that the proposed III-V/Si MOS capacitor Mach-Zehnder modulator overcomes the performance limit of the Si Mach-Zehnder modulator.

Original languageEnglish
Title of host publicationSilicon Photonics
Subtitle of host publicationFrom Fundamental Research to Manufacturing
EditorsLaurent Vivien, Peter O'Brien, Roel G. Baets
PublisherSPIE
ISBN (Print)9781510618985
DOIs
Publication statusPublished - 2018 Jan 1
Externally publishedYes
EventSilicon Photonics: From Fundamental Research to Manufacturing 2018 - Strasbourg, France
Duration: 2018 Apr 232018 Apr 26

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10686
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceSilicon Photonics: From Fundamental Research to Manufacturing 2018
CountryFrance
CityStrasbourg
Period18/4/2318/4/26

Fingerprint

MOS capacitors
Light modulators
Modulator
Capacitor
Modulators
Mach number
modulators
capacitors
Optical transceivers
Phase shifters
oxygen plasma
transmitter receivers
Insertion losses
insertion loss
Refractive Index
Optical Fiber
Insertion
Telecommunication links
High Efficiency
Optical fibers

Keywords

  • Mach-Zehnder modulator
  • Si photonics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Hiraki, T., Aihara, T., Hasebe, K., Fujii, T., Takeda, K., Tsuchizawa, T., ... Matsuo, S. (2018). Ultrahigh efficiency III-V on Si MOS capacitor optical modulator. In L. Vivien, P. O'Brien, & R. G. Baets (Eds.), Silicon Photonics: From Fundamental Research to Manufacturing [106860K] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10686). SPIE. https://doi.org/10.1117/12.2312315

Ultrahigh efficiency III-V on Si MOS capacitor optical modulator. / Hiraki, T.; Aihara, T.; Hasebe, K.; Fujii, T.; Takeda, K.; Tsuchizawa, T.; Kakitsuka, Takaaki; Fukuda, H.; Matsuo, S.

Silicon Photonics: From Fundamental Research to Manufacturing. ed. / Laurent Vivien; Peter O'Brien; Roel G. Baets. SPIE, 2018. 106860K (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10686).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hiraki, T, Aihara, T, Hasebe, K, Fujii, T, Takeda, K, Tsuchizawa, T, Kakitsuka, T, Fukuda, H & Matsuo, S 2018, Ultrahigh efficiency III-V on Si MOS capacitor optical modulator. in L Vivien, P O'Brien & RG Baets (eds), Silicon Photonics: From Fundamental Research to Manufacturing., 106860K, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10686, SPIE, Silicon Photonics: From Fundamental Research to Manufacturing 2018, Strasbourg, France, 18/4/23. https://doi.org/10.1117/12.2312315
Hiraki T, Aihara T, Hasebe K, Fujii T, Takeda K, Tsuchizawa T et al. Ultrahigh efficiency III-V on Si MOS capacitor optical modulator. In Vivien L, O'Brien P, Baets RG, editors, Silicon Photonics: From Fundamental Research to Manufacturing. SPIE. 2018. 106860K. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.2312315
Hiraki, T. ; Aihara, T. ; Hasebe, K. ; Fujii, T. ; Takeda, K. ; Tsuchizawa, T. ; Kakitsuka, Takaaki ; Fukuda, H. ; Matsuo, S. / Ultrahigh efficiency III-V on Si MOS capacitor optical modulator. Silicon Photonics: From Fundamental Research to Manufacturing. editor / Laurent Vivien ; Peter O'Brien ; Roel G. Baets. SPIE, 2018. (Proceedings of SPIE - The International Society for Optical Engineering).
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