Fingerprint
Dive into the research topics of 'Ultrathin silicon oxide film on Si(100) fabricated by highly concentrated ozone at atmospheric pressure'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Ultrathin silicon oxide film on Si(100) fabricated by highly concentrated ozone at atmospheric pressure
K. Nakamura*, S. Ichimura, A. Kurokawa, K. Koike, G. Inoue, T. Fukuda
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
35
Citations
(Scopus)