FingerprintDive into the research topics of 'Uniform characteristics of Si-wire waveguide devices fabricated on 300 mm SOI wafers by using ArF immersion lithography'. Together they form a unique fingerprint.
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Yuichiro Tanushi, Tomohiro Kita, Munehiro Toyama, Miyoshi Seki, Keiji Koshino, Nobuyuki Yokoyama, Minoru Ohtsuka, Akinobu Sugiyama, Eiichi Ishitsuka, Tsukuru Sano, Tsuyoshi Horikawa, Hirohito Yamada
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution