Use of a new anisotropic etching simulator on quartz crystal

M. Zhao, H. Oigawa, J. Wang, J. Ji, T. Ueda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper describes features of a new anisotropic etching simulator and its applications on predicting etching shape of quartz crystal. The simulator is suitable to predict etching profiles of two-dimensional initial shape which has a profile formed by straight lines. In this simulator, a program flow with uneven time step was used to furthest reduced the probability of improper shape prediction. We present here two examples of its application on both Z-plate and AT-plate quartz crystal to show its good performance.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages450-453
Number of pages4
DOIs
Publication statusPublished - 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing
Duration: 2011 Jun 52011 Jun 9

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CityBeijing
Period11/6/511/6/9

Fingerprint

Anisotropic etching
Quartz
Simulators
Crystals
Etching

Keywords

  • anisotropic etching
  • Micromaching
  • quartz crystal

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Zhao, M., Oigawa, H., Wang, J., Ji, J., & Ueda, T. (2011). Use of a new anisotropic etching simulator on quartz crystal. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 450-453). [5969578] https://doi.org/10.1109/TRANSDUCERS.2011.5969578

Use of a new anisotropic etching simulator on quartz crystal. / Zhao, M.; Oigawa, H.; Wang, J.; Ji, J.; Ueda, T.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 450-453 5969578.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhao, M, Oigawa, H, Wang, J, Ji, J & Ueda, T 2011, Use of a new anisotropic etching simulator on quartz crystal. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969578, pp. 450-453, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, 11/6/5. https://doi.org/10.1109/TRANSDUCERS.2011.5969578
Zhao M, Oigawa H, Wang J, Ji J, Ueda T. Use of a new anisotropic etching simulator on quartz crystal. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 450-453. 5969578 https://doi.org/10.1109/TRANSDUCERS.2011.5969578
Zhao, M. ; Oigawa, H. ; Wang, J. ; Ji, J. ; Ueda, T. / Use of a new anisotropic etching simulator on quartz crystal. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 450-453
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