UV nanoimprint lithography and its application for nanodevices

Makoto Fukuhara*, Hiroshi Ono, Tamano Hirasawa, Makoto Otaguchi, Nobuji Sakai, Jun Mizuno, Shuichi Shoji

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds