Vacuum Properties of TiN/Stainless Steel for Extremely High Vacuum

Yoshinao Ikeda, Kazuya Saito, Sonoko Tsukahara, Shingo Ichimura, Kiyohide Kokubun, Masahiro Hirata

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Coating of titanium nitride TiN film on stainless steel by hollow cathode discharge method under the controlled conditions has been developed and could reduce outgassing rate at the extremely high vacuum due to the hydrogen barrier effect of TiN1-3). This paper reports 1. further reduction of hydrogen permeation constant K of TiN film, 2. application of this technique to practical chamber preparation, and 3. reduction of outgassing rate of the resulting chamber. Hydrogen permeation constant of TiN films prepared by a laboratory equipment was decreased by improving the film structure to more dense and larger grains. The minimum hydrogen permeation constant K of TiN film at 500°C was 6 × 10-13Pa1/2·m2·s-1. Considering the above result, the practical condition of manufactuaring equipment was adjusted to make large samples for new XHV chambers fabricated for standard pressure measurement by Electrotechnical Laboratory in Japan. The resulting outgassing rate of a TiN coated chamber was measured by switching between two pumping paths (SPP) method at room temperature. At the ultimate pressure the outgassing rates of the stainless steel chamber was 3 × 10-12 Pa·m·s-1 after the prebaking of (430°C × 100 h + 500°C × 100 h) and after TiN coating on the chamber it decreased to less than 1 × 10-13 Pa·m·s-1, the lowest value obtained for stainless steel.

Original languageEnglish
Pages (from-to)507-511
Number of pages5
JournalShinku/Journal of the Vacuum Society of Japan
Volume41
Issue number5
DOIs
Publication statusPublished - 1998 Jan 1
Externally publishedYes

Fingerprint

Stainless Steel
high vacuum
Degassing
stainless steels
Stainless steel
outgassing
chambers
Vacuum
Hydrogen
vacuum
Permeation
hydrogen
Coatings
laboratory equipment
Titanium nitride
coatings
Pressure measurement
titanium nitrides
hollow cathodes
pressure measurement

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Vacuum Properties of TiN/Stainless Steel for Extremely High Vacuum. / Ikeda, Yoshinao; Saito, Kazuya; Tsukahara, Sonoko; Ichimura, Shingo; Kokubun, Kiyohide; Hirata, Masahiro.

In: Shinku/Journal of the Vacuum Society of Japan, Vol. 41, No. 5, 01.01.1998, p. 507-511.

Research output: Contribution to journalArticle

Ikeda, Yoshinao ; Saito, Kazuya ; Tsukahara, Sonoko ; Ichimura, Shingo ; Kokubun, Kiyohide ; Hirata, Masahiro. / Vacuum Properties of TiN/Stainless Steel for Extremely High Vacuum. In: Shinku/Journal of the Vacuum Society of Japan. 1998 ; Vol. 41, No. 5. pp. 507-511.
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