Variation of optical properties by the crystalline phase transition of polycrystalline silicon

Hidenori Iwata, Tomohiro Kita, Hirohito Yamada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We studied a characteristics trimming technique in Si photonic-wire waveguide devices. In order to trimming device properties, we utilized refractive index change of amorphous silicon when it crystallizes by annealing. We fabricated MZI devices with amorphous silicon waveguides, and demonstrated the trimming of the transmission spectra by thermal annealing and also laser annealing after finished the device fabrication process. We observed 5.2 % of the refractive index change owing to crystallization by annealing in a nitrogen atmosphere and 5.8% of change by laser crystallization.

Original languageEnglish
Title of host publicationSilicon Photonics VI
Volume7943
DOIs
Publication statusPublished - 2011 Apr 11
Externally publishedYes
EventSilicon Photonics VI - San Francisco, CA, United States
Duration: 2011 Jan 232011 Jan 26

Other

OtherSilicon Photonics VI
CountryUnited States
CitySan Francisco, CA
Period11/1/2311/1/26

Fingerprint

Annealing
Polysilicon
Optical Properties
Trimming
Silicon
Phase Transition
Optical properties
Phase transitions
Crystalline materials
optical properties
Amorphous Silicon
silicon
Crystallization
Amorphous silicon
Refractive Index
annealing
amorphous silicon
Waveguide
Refractive index
Waveguides

Keywords

  • Amorphous silicon
  • Laser annealing
  • Polycrystalline silicon
  • Silicon photonic-wire waveguide

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Variation of optical properties by the crystalline phase transition of polycrystalline silicon. / Iwata, Hidenori; Kita, Tomohiro; Yamada, Hirohito.

Silicon Photonics VI. Vol. 7943 2011. 79431F.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Iwata, H, Kita, T & Yamada, H 2011, Variation of optical properties by the crystalline phase transition of polycrystalline silicon. in Silicon Photonics VI. vol. 7943, 79431F, Silicon Photonics VI, San Francisco, CA, United States, 11/1/23. https://doi.org/10.1117/12.874435
Iwata, Hidenori ; Kita, Tomohiro ; Yamada, Hirohito. / Variation of optical properties by the crystalline phase transition of polycrystalline silicon. Silicon Photonics VI. Vol. 7943 2011.
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