Abstract
A resonant cavity waveguide device structure is reported which incorporates a grating structure to couple the vertical incident light into the waveguide and uses Bragg grating to constitute a resonator. Two types of grating are fabricated simultaneously on a surface of thin Si waveguide to gain high sensor sensitivity for the refractive index change measurement.
Original language | English |
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Pages (from-to) | 1078-1080 |
Number of pages | 3 |
Journal | Electronics Letters |
Volume | 46 |
Issue number | 15 |
DOIs | |
Publication status | Published - 2010 Jul 22 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering