Volume swelling of amorphous SiC during ion-beam irradiation

Manabu Ishimaru, In Tae Bae, Akihiko Hirata, Yoshihiko Hirotsu, James A. Valdez, Kurt E. Sickafus

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

Relationships between chemical short-range order and volume swelling of amorphous silicon carbide (SiC) under radiation environments have been examined using energy-filtering transmission electron microscopy in combination with imaging plate techniques. Single crystals of 4H SiC with (0001) orientation were irradiated with 300keV xenon ions to a fluence of 1015cm-2 at cryogenic (120K) and elevated (373K) temperatures. A continuous amorphous layer was formed in both specimens, but the magnitude of their volume change was different: volume swelling becomes more pronounced with decreasing irradiation temperatures. From radial distribution function analyses, it was found that the amount of Si Si atomic pairs increases more rapidly than that of C C atomic pairs with the progress of chemical disordering. We discuss the ion-beam-induced swelling in amorphous SiC within the context of our results as well as previous observations.

Original languageEnglish
Article number024116
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume72
Issue number2
DOIs
Publication statusPublished - 2005 Jul 1
Externally publishedYes

Fingerprint

Amorphous silicon
Silicon carbide
silicon carbides
swelling
Ion beams
amorphous silicon
Swelling
ion beams
Irradiation
irradiation
Xenon
radial distribution
Crystal orientation
Cryogenics
xenon
cryogenics
Distribution functions
fluence
distribution functions
Single crystals

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Volume swelling of amorphous SiC during ion-beam irradiation. / Ishimaru, Manabu; Bae, In Tae; Hirata, Akihiko; Hirotsu, Yoshihiko; Valdez, James A.; Sickafus, Kurt E.

In: Physical Review B - Condensed Matter and Materials Physics, Vol. 72, No. 2, 024116, 01.07.2005.

Research output: Contribution to journalArticle

Ishimaru, Manabu ; Bae, In Tae ; Hirata, Akihiko ; Hirotsu, Yoshihiko ; Valdez, James A. ; Sickafus, Kurt E. / Volume swelling of amorphous SiC during ion-beam irradiation. In: Physical Review B - Condensed Matter and Materials Physics. 2005 ; Vol. 72, No. 2.
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