Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution

Junichi Fujikata; Koichi Nose; Jun Ushida; Kenichi Nishi; Masao Kinoshita; Takanori Shimizu; Toshihide Ueno; Daisuke Okamoto; Akiko Gomyo; Masayuki Mizuno; Tai Tsuchizawa; Toshifumi Watanabe; Koji Yamada; Seiichi Itabashi; Keishi Ohashi

doi:10.1109/GROUP4.2008.4638136

Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution

Junichi Fujikata^*, Koichi Nose, Jun Ushida, Kenichi Nishi, Masao Kinoshita, Takanori Shimizu, Toshihide Ueno, Daisuke Okamoto, Akiko Gomyo, Masayuki Mizuno, Tai Tsuchizawa, Toshifumi Watanabe, Koji Yamada, Seiichi Itabashi, Keishi Ohashi

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

We developed a waveguide-integrated Si nano-photodiode (PD) with a surface plasmon (SP) antenna for on-chip optical clock distribution. The interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes were shown to function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer. Furthermore, a very high speed response of 17 ps as well as enhanced photoresponsivity was achieved for a 10-μm coupling length. By using this technology, we fabricated a prototype of a large-scale-integration (LSI) on-chip optical clock system and demonstrated 5 GHz of optical clock circuit operation connected with a 4-branching H-tree structure.

Original language	English
Title of host publication	2008 5th International Conference on Group IV Photonics, GFP
Pages	176-178
Number of pages	3
DOIs	https://doi.org/10.1109/GROUP4.2008.4638136
Publication status	Published - 2008
Externally published	Yes
Event	2008 5th International Conference on Group IV Photonics, GFP - Sorrento, Italy Duration: 2008 Sept 17 → 2008 Sept 19

Publication series

Name	2008 5th International Conference on Group IV Photonics, GFP

Conference

Conference	2008 5th International Conference on Group IV Photonics, GFP
Country/Territory	Italy
City	Sorrento
Period	08/9/17 → 08/9/19

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

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10.1109/GROUP4.2008.4638136

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Fujikata, J., Nose, K., Ushida, J., Nishi, K., Kinoshita, M., Shimizu, T., Ueno, T., Okamoto, D., Gomyo, A., Mizuno, M., Tsuchizawa, T., Watanabe, T., Yamada, K., Itabashi, S., & Ohashi, K. (2008). Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution. In 2008 5th International Conference on Group IV Photonics, GFP (pp. 176-178). [4638136] (2008 5th International Conference on Group IV Photonics, GFP). https://doi.org/10.1109/GROUP4.2008.4638136

Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution. / Fujikata, Junichi; Nose, Koichi; Ushida, Jun et al.

2008 5th International Conference on Group IV Photonics, GFP. 2008. p. 176-178 4638136 (2008 5th International Conference on Group IV Photonics, GFP).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fujikata, J, Nose, K, Ushida, J, Nishi, K, Kinoshita, M, Shimizu, T, Ueno, T, Okamoto, D, Gomyo, A, Mizuno, M, Tsuchizawa, T, Watanabe, T, Yamada, K, Itabashi, S & Ohashi, K 2008, Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution. in 2008 5th International Conference on Group IV Photonics, GFP., 4638136, 2008 5th International Conference on Group IV Photonics, GFP, pp. 176-178, 2008 5th International Conference on Group IV Photonics, GFP, Sorrento, Italy, 08/9/17. https://doi.org/10.1109/GROUP4.2008.4638136

Fujikata J, Nose K, Ushida J, Nishi K, Kinoshita M, Shimizu T et al. Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution. In 2008 5th International Conference on Group IV Photonics, GFP. 2008. p. 176-178. 4638136. (2008 5th International Conference on Group IV Photonics, GFP). doi: 10.1109/GROUP4.2008.4638136

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title = "Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution",

abstract = "We developed a waveguide-integrated Si nano-photodiode (PD) with a surface plasmon (SP) antenna for on-chip optical clock distribution. The interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes were shown to function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer. Furthermore, a very high speed response of 17 ps as well as enhanced photoresponsivity was achieved for a 10-μm coupling length. By using this technology, we fabricated a prototype of a large-scale-integration (LSI) on-chip optical clock system and demonstrated 5 GHz of optical clock circuit operation connected with a 4-branching H-tree structure.",

author = "Junichi Fujikata and Koichi Nose and Jun Ushida and Kenichi Nishi and Masao Kinoshita and Takanori Shimizu and Toshihide Ueno and Daisuke Okamoto and Akiko Gomyo and Masayuki Mizuno and Tai Tsuchizawa and Toshifumi Watanabe and Koji Yamada and Seiichi Itabashi and Keishi Ohashi",

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AU - Fujikata, Junichi

AU - Nose, Koichi

AU - Ushida, Jun

AU - Nishi, Kenichi

AU - Kinoshita, Masao

AU - Shimizu, Takanori

AU - Ueno, Toshihide

AU - Okamoto, Daisuke

AU - Gomyo, Akiko

AU - Mizuno, Masayuki

AU - Tsuchizawa, Tai

AU - Watanabe, Toshifumi

AU - Yamada, Koji

AU - Itabashi, Seiichi

AU - Ohashi, Keishi

PY - 2008

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N2 - We developed a waveguide-integrated Si nano-photodiode (PD) with a surface plasmon (SP) antenna for on-chip optical clock distribution. The interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes were shown to function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer. Furthermore, a very high speed response of 17 ps as well as enhanced photoresponsivity was achieved for a 10-μm coupling length. By using this technology, we fabricated a prototype of a large-scale-integration (LSI) on-chip optical clock system and demonstrated 5 GHz of optical clock circuit operation connected with a 4-branching H-tree structure.

AB - We developed a waveguide-integrated Si nano-photodiode (PD) with a surface plasmon (SP) antenna for on-chip optical clock distribution. The interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes were shown to function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer. Furthermore, a very high speed response of 17 ps as well as enhanced photoresponsivity was achieved for a 10-μm coupling length. By using this technology, we fabricated a prototype of a large-scale-integration (LSI) on-chip optical clock system and demonstrated 5 GHz of optical clock circuit operation connected with a 4-branching H-tree structure.

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BT - 2008 5th International Conference on Group IV Photonics, GFP

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Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution

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