Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution

Junichi Fujikata, Koichi Nose, Jun Ushida, Kenichi Nishi, Masao Kinoshita, Takanori Shimizu, Toshihide Ueno, Daisuke Okamoto, Akiko Gomyo, Masayuki Mizuno, Tai Tsuchizawa, Toshifumi Watanabe, Koji Yamada, Seiichi Itabashi, Keishi Ohashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We developed a waveguide-integrated Si nano-photodiode (PD) with a surface plasmon (SP) antenna for on-chip optical clock distribution. The interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes were shown to function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer. Furthermore, a very high speed response of 17 ps as well as enhanced photoresponsivity was achieved for a 10-μm coupling length. By using this technology, we fabricated a prototype of a large-scale-integration (LSI) on-chip optical clock system and demonstrated 5 GHz of optical clock circuit operation connected with a 4-branching H-tree structure.

Original languageEnglish
Title of host publication2008 5th International Conference on Group IV Photonics, GFP
Pages176-178
Number of pages3
DOIs
Publication statusPublished - 2008 Nov 21
Externally publishedYes
Event2008 5th International Conference on Group IV Photonics, GFP - Sorrento, Italy
Duration: 2008 Sep 172008 Sep 19

Publication series

Name2008 5th International Conference on Group IV Photonics, GFP

Conference

Conference2008 5th International Conference on Group IV Photonics, GFP
CountryItaly
CitySorrento
Period08/9/1708/9/19

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Fujikata, J., Nose, K., Ushida, J., Nishi, K., Kinoshita, M., Shimizu, T., Ueno, T., Okamoto, D., Gomyo, A., Mizuno, M., Tsuchizawa, T., Watanabe, T., Yamada, K., Itabashi, S., & Ohashi, K. (2008). Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution. In 2008 5th International Conference on Group IV Photonics, GFP (pp. 176-178). [4638136] (2008 5th International Conference on Group IV Photonics, GFP). https://doi.org/10.1109/GROUP4.2008.4638136