Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution

Junichi Fujikata*, Koichi Nose, Jun Ushida, Kenichi Nishi, Masao Kinoshita, Takanori Shimizu, Toshihide Ueno, Daisuke Okamoto, Akiko Gomyo, Masayuki Mizuno, Tai Tsuchizawa, Toshifumi Watanabe, Koji Yamada, Seiichi Itabashi, Keishi Ohashi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We developed a waveguide-integrated Si nano-photodiode (PD) with a surface plasmon (SP) antenna for on-chip optical clock distribution. The interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes were shown to function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer. Furthermore, a very high speed response of 17 ps as well as enhanced photoresponsivity was achieved for a 10-μm coupling length. By using this technology, we fabricated a prototype of a large-scale-integration (LSI) on-chip optical clock system and demonstrated 5 GHz of optical clock circuit operation connected with a 4-branching H-tree structure.

Original languageEnglish
Title of host publication2008 5th International Conference on Group IV Photonics, GFP
Pages176-178
Number of pages3
DOIs
Publication statusPublished - 2008
Externally publishedYes
Event2008 5th International Conference on Group IV Photonics, GFP - Sorrento, Italy
Duration: 2008 Sep 172008 Sep 19

Publication series

Name2008 5th International Conference on Group IV Photonics, GFP

Conference

Conference2008 5th International Conference on Group IV Photonics, GFP
Country/TerritoryItaly
CitySorrento
Period08/9/1708/9/19

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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