Wideband multimode transducer consisting of c-axis tilted ZnO/c-axis normal ZnO multilayer

Shinji Takayanagi, Takahiko Yanagitani, Mami Matsukawa

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Wideband ultrasonic transducers are required for acoustic imaging and nondestructive evaluation. In this study, we have fabricated transducer consisting of c-axis tilted ZnO/c-axis normal ZnO multilayer on the Au(111)/Ti/silica glass substrate. We have investigated the crystalline orientations and frequency characteristics of the multilayer transducer. An X-ray diffraction analysis and a scanning electron microscopy analysis of the transducer revealed that the c-axis normal ZnO layer was grown on the Au(111) layer during the initial stage of ZnO layer deposition. As ZnO grain growth proceeded, c-axis normal growth change to the c-axis tilted ZnO layer growth. This multilayer transducer excited secondovertone modes of longitudinal and shear waves as well as the fundamental mode in the UHF range. Therefore, the frequency bandwidth of the multilayer transducer was broader than that of a single layer transducer consisting of a c-axis tilted ZnO layer.

Original languageEnglish
Article number07GC08
JournalJapanese Journal of Applied Physics
Volume51
Issue number7 PART2
DOIs
Publication statusPublished - 2012 Jul
Externally publishedYes

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Transducers
Multilayers
transducers
broadband
Acoustic imaging
Ultrasonic transducers
acoustic imaging
Shear waves
Fused silica
Grain growth
longitudinal waves
Crystal orientation
silica glass
X ray diffraction analysis
S waves
Crystalline materials
Bandwidth
ultrasonics
Scanning electron microscopy
bandwidth

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Wideband multimode transducer consisting of c-axis tilted ZnO/c-axis normal ZnO multilayer. / Takayanagi, Shinji; Yanagitani, Takahiko; Matsukawa, Mami.

In: Japanese Journal of Applied Physics, Vol. 51, No. 7 PART2, 07GC08, 07.2012.

Research output: Contribution to journalArticle

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