X-ray absorption near edge structures of silicon nitride thin film by pulsed laser deposition

Takeo Suga, Teruyasu Mizoguchi, Masahiro Kunisu, Kazuyoshi Tatsumi, Tomoyuki Yamamoto, Isao Tanaka, Toshimori Sekine

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Silicon nitride thin film was fabricated by pulsed laser deposition using KrF excimer laser and a silicon nitride compact as a target. The deposition was carried out on Al2O3 (0001) at 1173 K in N2 gas pressure of 0.27Pa. The X-ray diffraction did not provide any structural information of the deposited thin films except that it is composed of amorphous and/or micro-crystalline structure. X-ray absorption near edge structures at Si-K edge revealed that local arrangement of Si is not random. It should be composed of SiN4 unit similar to the case of α-Si 3N4 crystal. Metallic Si component cannot be found in XANES.

Original languageEnglish
Pages (from-to)2039-2041
Number of pages3
JournalMaterials Transactions
Volume45
Issue number7
DOIs
Publication statusPublished - 2004 Jul
Externally publishedYes

Keywords

  • Pulsed laser deposition
  • Silicon nitride
  • X-ray absorption near edge structure

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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