X-ray diffraction profiles of Si nanowires with trapezoidal cross-sections

Teruaki Takeuchi, Kosuke Tatsumura, Iwao Ohdomari, Takayoshi Shimura, Masao Nagase

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Comparisons of the experimental and calculated X-ray diffraction profiles have been made for Si nanowires with trapezoidal cross-sections. Examined samples are periodically arranged nanowires prepared on a silicon-on-insulator wafer by electron-beam lithography, so that they are isolated from Si substrate. The nanowire periodicity gives rise to diffractions at additional reciprocal lattice points, which we employ to avoid the mixture of the diffraction from the Si substrate. The experimental diffraction profiles are found to be in good agreement with the square modulus of the Fourier transform of the trapezoidal cross-sections determined from transmission electron micrographs.

Original languageEnglish
Pages (from-to)2559-2564
Number of pages6
JournalPhysica B: Condensed Matter
Volume406
Issue number13
DOIs
Publication statusPublished - 2011 Jul 1

Fingerprint

Nanowires
nanowires
Diffraction
X ray diffraction
cross sections
profiles
diffraction
x rays
Electron beam lithography
Silicon
Substrates
Fourier transforms
periodic variations
lithography
Electrons
insulators
wafers
electron beams
silicon
electrons

Keywords

  • Fourier transform
  • Si nanowire
  • Trapezoidal cross-section
  • X-ray diffraction

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

X-ray diffraction profiles of Si nanowires with trapezoidal cross-sections. / Takeuchi, Teruaki; Tatsumura, Kosuke; Ohdomari, Iwao; Shimura, Takayoshi; Nagase, Masao.

In: Physica B: Condensed Matter, Vol. 406, No. 13, 01.07.2011, p. 2559-2564.

Research output: Contribution to journalArticle

Takeuchi, Teruaki ; Tatsumura, Kosuke ; Ohdomari, Iwao ; Shimura, Takayoshi ; Nagase, Masao. / X-ray diffraction profiles of Si nanowires with trapezoidal cross-sections. In: Physica B: Condensed Matter. 2011 ; Vol. 406, No. 13. pp. 2559-2564.
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