X-ray pulse-shape analysis on bridge-type microcalorimeters with Ti-Au transition-edge sensors

Masahiro Ukibe*, Keiichi Tanaka, Fuminori Hirayama, Taku Mizuki, Tomotaka Hikosaka, Toshimitsu Morooka, Kazuo Chinone, Ushio Kawabe, Toshio Nemoto, Masao Koyanagi, Masataka Ohkubo, Naoto Kobayashi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


We have fabricated a bridge-type structure for microcalorimeters with superconducting transition-edge sensors (TES). Instead of open space under a SiN x membrane in conventional TES microcalorimeters, the bridge-type calorimeters have a SiNx membrane floating on the Si substrate covered by a SiO 2 layer with a small gap of 30-50 μm. The bridge-type structure ensures that the calorimeters are mechanically tough. In addition, the thermal conductance can easily be controlled by changing the width, length, or thickness of the SiNx bridge. The calorimeters, of which operating temperature is 0.43 K, consist of a Ti/Au bilayer TES and an Au absorber. The x-ray events were read out by a DC-SQUID current amplifier with a 200-series array of SQUIDs placed on a 4.2 K stage. By analyzing the output pulse shapes, it has been found that the pulses are put into two categories. One has a fast rise time of approximately 3 μs and two decay components with time constants of approximately 10 μs and about approximately 130 μs. Another one has a longer rise time of approximately 10 μs and a single decay component of approximately 130 μs. It is considered that the pulse shapes depend on the x-ray absorption positions and the heat-flow pass.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Number of pages8
Publication statusPublished - 2000
Externally publishedYes
EventX-Ray and Gamma-Ray Instrumentation for Astronomy XI - San Diego, CA,USA
Duration: 2000 Aug 22000 Aug 4


OtherX-Ray and Gamma-Ray Instrumentation for Astronomy XI
CitySan Diego, CA,USA

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics


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