Zig-zag ScAlN multilayer SMR for high power BAW fileter application such as RF base station

Yusuke Sato, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

RF filters for the base station require higher power durability than those for the mobile devices. Dielectric cavity resonator filters commonly used for the base station have high power durability, however the size of those filters is large. c-Axis zig-zag multilayer SMR is one of the solutions to this problem. In this study, we reported the c-axis zig-zag 12-layer ScAlN film stack on the Bragg reflector. c-Axis zig-zag ScAlN multilayer strcture was observed by scanning electron microscopy. The 12th quasi shear mode resonance excitation was clearly observed. We evaluated durability of multilayer and single layer.

Original languageEnglish
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
Publication statusPublished - 2020 Sep 7
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: 2020 Sep 72020 Sep 11

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
Country/TerritoryUnited States
CityLas Vegas
Period20/9/720/9/11

Keywords

  • BAW filter
  • SMR

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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