ZnO: Ga-Based transparent conductive films: An attractive potential for use in flat panel display

Tetsuya Yamamoto, Takahiro Yamada, Toshiyuki Sakemi, Sho Shirakata, Minoru Osada, Seiichi Kishimoto, Kiyoshi Awai, Hisao Makino, Tooru Mitsunaga

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

The advantageous features of polycrystalline gallium (Ga)-doped ZnO (GZO) films, being cost-effective and easy to fabricate on a production scale, make them very attractive potential for use in transparent conductive electrode in flat display panel and thin film solar cells. In this work, GZO films have been prepared by reactive plasma deposition with non-traveling and traveling substrate mechanism. We have succeeded in fabricating 180 nm GZO films with low resistivity of 2.7 × 10-4 Ωcm and high transmittance more than 90 % in the visible wave length region on a glass substrate at temperature of 200 □ with a size up to 1m × 1m. On the basis of the analysis of data obtained by theoretical prediction and experimental study concerning micro-structural properties for GZO films, such as which sites Ga donors occupy, we have shown how to obtain electrical and optical properties required for application controlling the main process parameters, oxygen partial pressure.

Original languageEnglish
Title of host publicationCeramic Transactions
Pages475-489
Number of pages15
Volume196
Publication statusPublished - 2006
Externally publishedYes
Event6th Pacific Rim Conference on Ceramic and Glass Technology - Maui, Hawaii, United States
Duration: 2005 Sep 112005 Sep 16

Publication series

NameCeramic Transactions
Volume196
ISSN (Print)10421122

Other

Other6th Pacific Rim Conference on Ceramic and Glass Technology
CountryUnited States
CityMaui, Hawaii
Period05/9/1105/9/16

ASJC Scopus subject areas

  • Ceramics and Composites

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  • Cite this

    Yamamoto, T., Yamada, T., Sakemi, T., Shirakata, S., Osada, M., Kishimoto, S., Awai, K., Makino, H., & Mitsunaga, T. (2006). ZnO: Ga-Based transparent conductive films: An attractive potential for use in flat panel display. In Ceramic Transactions (Vol. 196, pp. 475-489). (Ceramic Transactions; Vol. 196).