ナノ・ライフ創新研究機構

  • Japan

研究成果 1971 2020

フィルター
Conference contribution
2013
6 引用 (Scopus)

Surface compliant bonding properties of low-temperature wafer bonding using sub-micron Au particles

Ishida, H., Ogashiwa, T., Kanehira, Y., Murai, H., Yazaki, T., Ito, S. & Mizuno, J., 2013, Proceedings - Electronic Components and Technology Conference. p. 1519-1523 5 p. 6575773

研究成果: Conference contribution

Wafer bonding
Particle size
Surface topography
Temperature
Scanning electron microscopy
5 引用 (Scopus)

Variable multi-color microfluidic organic light emitting device based on mixing of electrochemiluminescence solutions

Kasahara, T., Mizuno, J., Matsunami, S., Edura, T., Tsuwaki, M., Oshima, J., Adachi, C. & Shoji, S., 2013, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. p. 2596-2599 4 p. 6627337

研究成果: Conference contribution

Microfluidics
Color
Microchannels
Tin oxides
Indium
8 引用 (Scopus)

VUV-assisted low temperature bonding for organic/inorganic hybrid integration at atmospheric pressure

Shigetou, A., Ajayan, M. & Mizuno, J., 2013, ICSJ 2013 - IEEE CPMT Symposium Japan. IEEE Computer Society, 6756119

研究成果: Conference contribution

Atmospheric pressure
Irradiation
Vacuum
Substrates
Polydimethylsiloxane

Wide range dynamic volume ratio and size control of microdroplets using active droplet division device

Ito, J., Yoon, D., Sekiguchi, T. & Shoji, S., 2013, 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013. Chemical and Biological Microsystems Society, 巻 2. p. 742-744 3 p.

研究成果: Conference contribution

Microchannels
Pneumatics
Oils
Water
2012
1 引用 (Scopus)

Bonding properties of low-temperature wafer bonding using sub-micron gold particles with different particle sizes

Ishida, H., Ogashiwa, T., Kanehira, Y., Ito, S., Yazaki, T., Shoji, S. & Mizuno, J., 2012, Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT. p. 167-170 4 p. 6420217

研究成果: Conference contribution

Wafer bonding
Gold
Particle size
Photolithography
MEMS
1 引用 (Scopus)

Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure

Yoon, D., Sekiguchi, T., Go, J. S. & Shoji, S., 2012, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 1025-1028 4 p. 6170189

研究成果: Conference contribution

three dimensional flow
Polydimethylsiloxane
laminates
Multilayers
alignment
1 引用 (Scopus)

Fast analysis of biological compounds by gradient liquid chromatography using pillar array column

Song, Y., Noguchi, M., Takatsuki, K., Sekiguchi, T., Mizuno, J., Funatsu, T., Shoji, S. & Tsunoda, M., 2012, Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012. Chemical and Biological Microsystems Society, p. 587-589 3 p.

研究成果: Conference contribution

Liquid chromatography
Biomolecules
Fabrication
4 引用 (Scopus)

Hybrid Au-underfill resin bonding with lock-and-key structure

Nimura, M., Shigetou, A., Sakuma, K., Ogino, H., Enomoto, T., Mizuno, J. & Shoji, S., 2012, Proceedings - Electronic Components and Technology Conference. p. 258-262 5 p. 6248837

研究成果: Conference contribution

Resins
Electron microscopes
Acoustic microscopes
Scanning
Dry etching
2 引用 (Scopus)

Hybrid solder-adhesive bonding using simple resin planarization technique for 3D LSI

Nimura, M., Sakuma, K., Ogino, H., Enomoto, T., Shigetou, A., Shoji, S. & Mizuno, J., 2012, Proceedings of 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012. p. 81 1 p. 6238052

研究成果: Conference contribution

Soldering alloys
Integrated circuits
Adhesives
Resins
7 引用 (Scopus)

Low-temperature, surface-compliant wafer bonding using sub-micron gold particles for wafer-level MEMS packaging

Ishida, H., Ogashiwa, T., Kanehira, Y., Ito, S., Yazaki, T. & Mizuno, J., 2012, Proceedings - Electronic Components and Technology Conference. p. 1140-1145 6 p. 6248979

研究成果: Conference contribution

Wafer bonding
Gold
MEMS
Packaging
Photolithography

Low temperature Au-Au flip chip bonding with VUV/O 3 treatment for 3D integration

Okada, A., Nimura, M., Unami, N., Shigetou, A., Noma, H., Sakuma, K., Shoji, S. & Mizuno, J., 2012, Proceedings of 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012. p. 171 1 p. 6238082

研究成果: Conference contribution

Vacuum
Temperature
Shear strength
Irradiation
Impurities
1 引用 (Scopus)

Low temperature bonding using sub-micron Au particles for wafer-level MEMS packaging

Ito, S., Mizuno, J., Ishida, H., Ogashiwa, T., Kanehira, Y., Murai, H., Wakai, F. & Shoji, S., 2012, 2012 2nd IEEE CPMT Symposium Japan, ICSJ 2012. 6523451

研究成果: Conference contribution

MEMS
Packaging
Temperature
Tensile strength
Sintering

Low-temperature wafer bonding using sub-micron gold particles for wafer-level MEMS packaging

Ishida, H., Ogashiwa, T., Kanehira, Y., Ito, S., Yazaki, T. & Mizuno, J., 2012, Proceedings of 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2012. p. 173 1 p. 6238083

研究成果: Conference contribution

Wafer bonding
MEMS
Packaging
Gold
Temperature
1 引用 (Scopus)

Measurement of inflammatory cytokine secretion from human monocytes after inflammasome activation

Shirasaki, Y., Nakahara, A., Shimura, N., Izawa, K., Suzuki, N., Yamagishi, M., Mizuno, J., Sekiguchi, T., Nishikomori, R., Shoji, S. & Ohara, O., 2012, Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012. Chemical and Biological Microsystems Society, p. 1012-1014 3 p.

研究成果: Conference contribution

Inflammasomes
Adenosinetriphosphate
Interleukin-1beta
Chemical activation
Cytokines
5 引用 (Scopus)

Microfluidic organic light emitting diode (OLED) using liquid organic semiconductors

Kasahara, T., Mizuno, J., Hirata, S., Edura, T., Matsunami, S., Adachi, C. & Shoji, S., 2012, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 1069-1072 4 p. 6170256

研究成果: Conference contribution

Semiconducting organic compounds
Organic light emitting diodes (OLED)
organic semiconductors
microchannels
Microchannels
4 引用 (Scopus)

Phonon dispersion in <100> Si nanowire covered with SiO2 Film calculated by molecular dynamics simulation

Watanabe, T., Zushi, T., Tomita, M., Kuriyama, R., Aoki, N. & Kamioka, T., 2012, ECS Transactions. 9 版 巻 50. p. 673-680 8 p.

研究成果: Conference contribution

Nanowires
Molecular dynamics
Computer simulation
Phonon scattering
Electron scattering
1 引用 (Scopus)

Scanning-electron-microscope image processing for accurate analysis of line-edge and line-width roughness

Hiraiwa, A. & Nishida, A., 2012, Proceedings of SPIE - The International Society for Optical Engineering. 巻 8324. 83241D

研究成果: Conference contribution

Scanning Electron Microscope
Linewidth
Roughness
image processing
Image Processing
1 引用 (Scopus)

Size-oriented passive droplet sorting by using surface free energy with micro guide groove

Harada, Y., Yoon, D., Sekiguchi, T. & Shoji, S., 2012, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 1105-1108 4 p. 6170355

研究成果: Conference contribution

classifying
Sorting
grooves
Free energy
free energy

Uniform and high throughput agarose gel micro droplet generation device for single cell analysis

Hirose, T., Hoshino, Y., Yoon, D., Nakahara, A., Mori, T., Sekiguchi, T., Takeyama, H. & Shoji, S., 2012, Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012. Chemical and Biological Microsystems Society, p. 500-502 3 p.

研究成果: Conference contribution

Sepharose
Gels
Throughput
Encapsulation
Temperature control
2 引用 (Scopus)

Using nano-porous Au-Ag sheets as a joint layer for low-temperature Au-Au bonding

Mimatsu, H., Mizuno, J., Kasahara, T., Saito, M., Nishikawa, H. & Shoji, S., 2012, 2012 2nd IEEE CPMT Symposium Japan, ICSJ 2012. 6523449

研究成果: Conference contribution

Annealing
Temperature
Ligaments
Liquid nitrogen
Chemical properties
1 引用 (Scopus)

UV/vapor-assisted hybrid bonding technology as a tool for future nanopackaging

Shigetou, A., Mano, A., Mizuno, J. & Suga, T., 2012, Proceedings of the IEEE Conference on Nanotechnology. 6322199

研究成果: Conference contribution

Polyimides
Polydimethylsiloxane
polyimides
Vapors
vapors
1 引用 (Scopus)

Yeast-based ligand assay system for detecting G protein-coupled receptor activation in water-in-oil droplets

Sakurai, T., Iizuka, R., Tanigaki, Y., Sekine, R., Yoon, D., Sekiguchi, T., Ishii, J., Kondo, A., Nemoto, N., Shoji, S. & Funatsu, T., 2012, Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012. Chemical and Biological Microsystems Society, p. 1537-1539 3 p.

研究成果: Conference contribution

G-Protein-Coupled Receptors
Yeast
Assays
Oils
Chemical activation
2011
1 引用 (Scopus)

Contact probe card with large overdrive

Kimoto, G., Watanabe, T., Matsusaka, S., Kuroda, T. & Saito, M., 2011, ECS Transactions. 21 版 巻 33. p. 57-67 11 p.

研究成果: Conference contribution

Elastic deformation
Polyimides
Printing
Etching
Resins

Controllable three-dimensional sheath flow with a wide range reynolds number and its application for efficient cell sorting

Sekine, R., Sakurai, T., Yoon, D., Iizuka, R., Sekiguchi, T., Funatsu, T. & Shoji, S., 2011, 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011. 巻 3. p. 1903-1905 3 p.

研究成果: Conference contribution

Sorting
Reynolds number
Cells
Yeast
Core samples
2 引用 (Scopus)

Development on self-assembly technique for arrangement of chemically synthesized FePt nanoparticles

Hachisu, T., Sugiyama, A. & Osaka, T., 2011, ECS Transactions. 34 版 巻 33. p. 107-113 7 p.

研究成果: Conference contribution

Self assembly
Nanoparticles
Magnetization
Substrates
Nanoimprint lithography

Effect of palladium nuclei insertion by electroless deposition on magnetic intergranular isolation and read/write characteristics in SmCo 5 perpendicular magnetic recording media

Sugiyama, A., Egawa, Y., Koizumi, I., Yoshino, M., Hokkyo, J., Asahi, T., Kiya, T., Ariake, J., Ouchi, K. & Osaka, T., 2011, Physics Procedia. 巻 16. p. 68-74 7 p.

研究成果: Conference contribution

electroless deposition
magnetic recording
palladium
insertion
isolation
1 引用 (Scopus)

Evaluation of UV roller imprinting using replicated fluorinated film molds

Shibazaki, T., Li, L., Shinohara, H., Shoji, S., Mizuno, J., Tsunozaki, K. & Kawaguchi, Y., 2011, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. p. 1254-1257 4 p. 6017585

研究成果: Conference contribution

rollers
evaluation
Vickers hardness
curing
resins
4 引用 (Scopus)

Evaluations of low temperature bonding using Au sub-micron particles for wafer level MEMS packaging

Ito, S., Ogashiwa, T., Kanehira, Y., Ishida, H., Shoji, S. & Mizuno, J., 2011, Proceedings - International Symposium on Advanced Packaging Materials. p. 342-347 6 p. 6105749

研究成果: Conference contribution

Packaging
Seals
Hermetic seals
Container closures
Wafer bonding
18 引用 (Scopus)

Fluxless bonding for fine-pitch and low-volume solder 3-D interconnections

Sakuma, K., Toriyama, K., Noma, H., Sueoka, K., Unami, N., Mizuno, J., Shoji, S. & Orii, Y., 2011, Proceedings - Electronic Components and Technology Conference. p. 7-13 7 p. 5898483

研究成果: Conference contribution

Soldering alloys
Hydrogen
formic acid
Ion microscopes
Scanning
1 引用 (Scopus)

Integration of a gradient elution system for pressure-driven liquid chromatography with mems fabricated efficient pillar array columns

Song, Y., Noguchi, M., Takatsuki, K., Sekiguchi, T., Shoji, S., Funatsu, T., Mizuno, J. & Tsunoda, M., 2011, 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011. 巻 1. p. 635-637 3 p.

研究成果: Conference contribution

Liquid chromatography
Microfabrication
Dyes
1 引用 (Scopus)

Investigation of laterally-enhanced growth mechanism of Au electrodeposition onto SiO 2 surface modified with organic molecules

Kobayashi, C., Yoshida, S., Saito, M. & Homma, T., 2011, ECS Transactions. 37 版 巻 33. p. 1-11 11 p.

研究成果: Conference contribution

Self assembled monolayers
Electrodeposition
Molecules
Ions
Electrodes

Investigation on the hardness and morphology of Be-Cu for probing Al layers

Saito, M., Kimoto, G. & Homma, T., 2011, ECS Transactions. 38 版 巻 33. p. 65-72 8 p.

研究成果: Conference contribution

Alumina
Hardness
Oxides
3 引用 (Scopus)

Investigations of fluxless flip-chip bonding using vacuum ultraviolet and formic acid vapor surface treatment

Unami, N., Noma, H., Sakuma, K., Shigetou, A., Shoji, S. & Mizuno, J., 2011, Proceedings - International Symposium on Advanced Packaging Materials. p. 220-225 6 p. 6105704

研究成果: Conference contribution

formic acid
Formic acid
Surface treatment
Vapors
Vacuum
1 引用 (Scopus)

Low temperature Au-Au bonding with VUV/O 3 treatment

Okada, A., Nimura, M., Unami, N., Shigetou, A., Noma, H., Sakuma, K., Mizuno, J. & Shoji, S., 2011, 2011 IEEE International 3D Systems Integration Conference, 3DIC 2011. 6263015

研究成果: Conference contribution

Vacuum
Temperature
Impurities
Shear strength
Atomic force microscopy

Microfluidic active sorting of DNA molecules labeled with single quantum dots using flow switching by a hydrogel sol-gel transition

Haneoka, M., Shirasaki, Y., Sugino, H., Sekiguchi, T., Yoon, D., Iizuka, R., Shoji, S. & Funatsu, T., 2011, 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011. 巻 3. p. 1773-1775 3 p.

研究成果: Conference contribution

Sorting
Microfluidics
Hydrogels
Semiconductor quantum dots
Sol-gels

Microstructure of electrodeposited nano-crystalline Au-Ni alloy films

Inoue, T., Sato, K., Yokoshima, T., Sawaguchi, T., Sugiyama, A., Okinaka, Y. & Osaka, T., 2011, ECS Transactions. 37 版 巻 33. p. 27-34 8 p.

研究成果: Conference contribution

Crystalline materials
Microstructure
Carbon
Transmission electron microscopy
Scanning electron microscopy

NEXAFS and XPS studies of VUV/O3 treated aromatic polyurea for high-speed electrophoresis microchips

Shinohara, H., Nakahara, A., Shoji, S., Mizuno, J., Takahashi, Y., Kitagawa, F., Otsuka, K. & Ohara, O., 2011, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. p. 1267-1271 5 p. 6017588

研究成果: Conference contribution

electrophoresis
albumins
serums
fine structure
high speed
1 引用 (Scopus)

Relation between effective charge numbers and signals caused by protein adsorption on field effect transistor detection

Hideshima, S., Nakamura, T., Kuroiwa, S. & Osaka, T., 2011, ECS Transactions. 7 版 巻 35. p. 121-124 4 p.

研究成果: Conference contribution

Field effect transistors
Proteins
Adsorption
Surface charge
Ionic strength
1 引用 (Scopus)

Single cell analysis of the proinflammatory responses of mast cell by a real time secretion assay

Shirasaki, Y., Nakahara, A., Shimura, N., Suzuki, N., Yamagishi, M., Mizuno, J., Shoji, S. & Ohara, O., 2011, 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011. 巻 2. p. 843-845 3 p.

研究成果: Conference contribution

Assays
Fluorescence
Fluorine containing polymers
Imaging techniques
Monitoring
2 引用 (Scopus)

Single cell real time secretion assay using amorphous fluoropolymer microwell array

Shirasaki, Y., Nakahara, A., Shimura, N., Yamagishi, M., Mizuno, J., Ohara, O. & Shoji, S., 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. p. 755-758 4 p. 5969330

研究成果: Conference contribution

Fluorine containing polymers
Assays
Fluorescence
Imaging techniques
Wave interference
10 引用 (Scopus)

Solder/adhesive bonding using simple planarization technique for 3D integration

Nimura, M., Mizuno, J., Sakuma, K. & Shoji, S., 2011, Proceedings - Electronic Components and Technology Conference. p. 1147-1152 6 p. 5898655

研究成果: Conference contribution

Soldering alloys
Adhesives
Chemical mechanical polishing
Encapsulation
Resins
2 引用 (Scopus)

Volume controlled high throughput picoliter droplet generation system using cascade multi-stage separation channel

Fujii, M., Kawai, K., Yoon, D. & Shoji, S., 2011, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 1201-1204 4 p. 5734647

研究成果: Conference contribution

stage separation
Cascades (fluid mechanics)
cascades
Throughput
flow velocity
2010
2 引用 (Scopus)

A microfluidic mammalian cell sorter with thermal gelation polymer solution

Shirasaki, Y., Goto, M., Sugino, H., Arakawa, T., Yoon, D., Mizuno, J., Shoji, S., Funatsu, T. & Ohara, O., 2010, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. 巻 3. p. 1571-1573 3 p.

研究成果: Conference contribution

Infrared lasers
Gelation
Polymer solutions
Sorting
Microfluidics
6 引用 (Scopus)

Effect of Tl-codeposition on Au electrodeposition from non-cyanide bath

Saito, M., Inoue, K., Shiokawa, K. & Homma, T., 2010, ECS Transactions. 34 版 巻 25. p. 87-96 10 p.

研究成果: Conference contribution

Electrodeposition
Hardness
X ray analysis
Glow discharges
Deposition rates
2 引用 (Scopus)

Fabrication of nanogap electrodes using electrodeposition process

Kobayashi, C., Yoshida, S., Saito, M., Wakayama, Y. & Homma, T., 2010, ECS Transactions. 41 版 巻 25. p. 29-40 12 p.

研究成果: Conference contribution

Electrodeposition
Fabrication
Electrodes
Dendrimers
Self assembled monolayers
2 引用 (Scopus)

Fluxless bonding using vacuum ultraviolet and formic acid for 3D interconnects

Sakuma, K., Unami, N., Shoji, S. & Mizuno, J., 2010, Materials Research Society Symposium Proceedings. 巻 1249. p. 299-307 9 p.

研究成果: Conference contribution

formic acid
Formic acid
Vacuum
vacuum
acids
1 引用 (Scopus)

MEMS fabricated liquid chromatography microchip for practical uses

Noguchi, M., Tsunoda, M., Mizuno, J., Funatsu, T. & Shoji, S., 2010, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 911-914 4 p. 5442355

研究成果: Conference contribution

Liquid chromatography
liquid chromatography
microelectromechanical systems
MEMS
Silicon
4 引用 (Scopus)

Multi channel droplet sorting device with horizontal pneumatic actuation using single layer PDMS flexible parallel walls

Wakui, D., Takahashi, S., Sekiguchi, T. & Shoji, S., 2010, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 144-147 4 p. 5442544

研究成果: Conference contribution

pneumatics
classifying
actuation
Sorting
Pneumatics

New proposal for the interfacial design toward the establishment of electrochemical device engineering

Osaka, T. & Nakanishi, T., 2010, ECS Transactions. 29 版 巻 28. p. 17-24 8 p.

研究成果: Conference contribution

Nanotechnology
Electrolytes
Electrodes
2 引用 (Scopus)

Selective droplet sampling flow system using minimum number of horizontal pneumatic valves formed by single step PDMS molding

Yoon, D., Wakui, D., Sekiguchi, T. & Shoji, S., 2010, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. 巻 2. p. 1085-1087 3 p.

研究成果: Conference contribution

Molding
Pneumatics
Sampling
Sorting
Flow control