Shoji, S.,
Yoon, D. H.,
Tanaka, D. &
Sekiguchi, T.,
2021 6月 20,
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc.,
p. 206-208 3 p. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).
研究成果: Conference contribution