Uchida, T., Yasuga, H., Tachi, T.,
Iwase, E. & Onoe, H.,
2020 1,
33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc.,
p. 992-993 2 p. 9056453. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); vol. 2020-January).
研究成果: Conference contribution