庄子 習一

研究成果

年別の研究成果

1981 2020

• 4771 被引用数
• 34 h-index
• 209 Article
• 199 Conference contribution
• 31 Paper
• 21 Conference article
• 15 その他
  • 6 Chapter
  • 4 Editorial
  • 2 Letter
  • 2 Review article
  • 1 Comment/debate

年別の研究成果

年別の研究成果

検索結果

• 1990

  Micropump and sample-injector for integrated chemical analyzing systems

  Shoji, S., Nakagawa, S. & Esashi, M., 1990 2, In: Sensors and Actuators: A. Physical. 21, 1-3, p. 189-192 4 p.

  研究成果: Article › 査読

  • injectors
  • Pumps
  • pumps
  • Micromachining
  • Silicon wafers
  127 被引用数 (Scopus)
• 1989

  Fabrication of a micropump for integrated chemical analyzing systems

  Shoji, S. & Esashi, M., 1989, In: Electronics and Communications in Japan (Part II: Electronics). 72, 10, p. 52-59 8 p.

  研究成果: Article › 査読

  • Pumps
  • Fabrication
  • pumps
  • Substrates
  • fabrication
  4 被引用数 (Scopus)

• Normally closed microvalve and mircopump fabricated on a silicon wafer

  Esashi, M., Shoji, S. & Nakano, A., 1989 11 15, In: Sensors and Actuators. 20, 1-2, p. 163-169 7 p.

  研究成果: Article › 査読

  • Silicon wafers
  • Diaphragms
  • Flow rate
  • Polysilicon
  • Flow of gases
  139 被引用数 (Scopus)
• 1988

  Fabrication of an integrated microprobing head for fault analysis of mos integrated circuits

  Shoji, S., Esashi, M. & Matsuo, T., 1988 6, In: Sensors and Actuators. 14, 2, p. 125-132 8 p.

  研究成果: Article › 査読

  • Silicon wafers
  • Integrated circuits
  • Capacitance
  • Time delay
  • Fabrication
  1 被引用数 (Scopus)

• Prototype miniature blood gas analyser fabricated on a silicon wafer

  Shoji, S., Esashi, M. & Matsuo, T., 1988 6, In: Sensors and Actuators. 14, 2, p. 101-107 7 p.

  研究成果: Article › 査読

  • Silicon wafers
  • Blood
  • Gases
  • Ion sensitive field effect transistors
  • Machining
  83 被引用数 (Scopus)
• 1987

  A multimicroelectrode fabricated by silicon dry etching

  Takahashi, K., Shoji, S. & Matsuo, T., 1987, In: Electronics and Communications in Japan (Part II: Electronics). 70, 4, p. 86-92 7 p.

  研究成果: Article › 査読

  • Dry etching
  • Silicon
  • Electrodes
  • etching
  • electrodes
• 1986

  M₂O‐Al₂O₃‐SiO₂ glass gate PNA and pK ISFETs

  Shoji, S., Esashi, M. & Matsuo, T., 1986, In: Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi). 69, 5, p. 19-27 9 p.

  研究成果: Article › 査読

  • Ion sensitive field effect transistors
  • Ions
  • Glass
  • selectivity
  • Membranes

• Prototype of micro ISFET for biomedical research

  Shoji, S., Esashi, M. & Matsuo, T., 1986, In: Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi). 69, 6, p. 21-29 9 p.

  研究成果: Article › 査読

  • Field effect transistors
  • prototypes
  • field effect transistors
  • Ions
  • probes
• 1981

  Prototype sodium and potassium sensitive micro ISFETS

  Ohta, Y., Shoji, S., Esahi, M. & Matsuo, T., 1981 1 1, In: Sensors and Actuators. 2, C, p. 387-397 11 p.

  研究成果: Article › 査読

  • Ion sensitive field effect transistors
  • Potassium
  • Sodium
  • Ions
  • Tantalum
  11 被引用数 (Scopus)