Watanabe, T.,
Tomita, M.,
Zhan, T., Shima, K., Himeda, Y., Yamato, R., Matsukawa, T. & Matsuki, T.,
2019 1 1,
Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9. Kakushima, K., Obeng, Y. S., Gusev, E. P., De Gendt, S., Timans, P. J., Karim, Z., Roozeboom, F., Misra, D. & Jagannathan, H. (eds.).
3 ed. Electrochemical Society Inc.,
p. 95-110 16 p. (ECS Transactions; vol. 89, no. 3).
研究成果: Conference contribution