10μW/cm2-class high power density planar Si-nanowire thermoelectric energy harvester compatible with CMOS-VLSI technology

Motohiro Tomita, S. Oba, Y. Himeda, R. Yamato, K. Shima, T. Kumada, M. Xu, H. Takezawa, K. Mesaki, K. Tsuda, S. Hashimoto, Tianzhuo Zhan, H. Zhang, Y. Kamakura, Y. Suzuki, H. Inokawa, H. Ikeda, T. Matsukawa, T. Matsuki, Takanobu Watanabe

研究成果: Conference contribution

1 引用 (Scopus)

抜粋

A best benchmark of Si-nanowire (NW) thermoelectric (TE) power generator has been achieved by our proposed planar device architecture compatible with CMOS process technology. The TE power density corresponds to 12 μW/cm2, which is recorded at an externally applied temperature difference of only 5 K. The demonstration opens up a pathway to cost effective autonomous internet of things (IoT) application utilizing environmental and body heats.

元の言語English
ホスト出版物のタイトル2018 IEEE Symposium on VLSI Technology, VLSI Technology 2018
出版者Institute of Electrical and Electronics Engineers Inc.
ページ93-94
ページ数2
2018-June
ISBN(電子版)9781538642160
DOI
出版物ステータスPublished - 2018 10 25
イベント38th IEEE Symposium on VLSI Technology, VLSI Technology 2018 - Honolulu, United States
継続期間: 2018 6 182018 6 22

Other

Other38th IEEE Symposium on VLSI Technology, VLSI Technology 2018
United States
Honolulu
期間18/6/1818/6/22

    フィンガープリント

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

これを引用

Tomita, M., Oba, S., Himeda, Y., Yamato, R., Shima, K., Kumada, T., Xu, M., Takezawa, H., Mesaki, K., Tsuda, K., Hashimoto, S., Zhan, T., Zhang, H., Kamakura, Y., Suzuki, Y., Inokawa, H., Ikeda, H., Matsukawa, T., Matsuki, T., & Watanabe, T. (2018). 10μW/cm2-class high power density planar Si-nanowire thermoelectric energy harvester compatible with CMOS-VLSI technology. : 2018 IEEE Symposium on VLSI Technology, VLSI Technology 2018 (巻 2018-June, pp. 93-94). [8510659] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/VLSIT.2018.8510659