抄録
We report a high-productivity chemical vapor deposition (CVD) process of graphene by extending the reaction field to three dimensions (3D) and shortening the CVD time to a few minutes. A large Cu foil (5 × 30 cm 2 ) is rolled up and set in a small reactor (3.4 cm in diameter), and a continuous graphene film is obtained uniformly in a short time (1.5 min) by using C 2 H 4 as a more reactive carbon source than the popular CH 4 . The graphene transferred onto a quartz glass showed optical transmittances of 94.8–96.7% (550 nm) with sheet resistances of 0.78–1.68 kΩ sq −1 (without doping) and 0.3 kΩ sq −1 (with doping by HNO 3 vapor). Compared with the previous reports for fast and/or large-scale CVD, our method realized similarly high productivity of 100 cm 2 min −1 based on the CVD time despite of the small reactor, and higher productivity of 0.03 cm 2 -graphene per cm 3 -reactor per minute based on the reactor volume and total time for high temperature processing (15 min for heating, 1 min for annealing, and 1.5 min for CVD). The knowledge obtained here on the CVD conditions and packing ratio of Cu foils (0.55 cm 2 per cm 3 -reactor) is reusable for designing large-scale graphene production processes.
| 元の言語 | English |
|---|---|
| ページ（範囲） | 319-324 |
| ページ数 | 6 |
| ジャーナル | Chemical Engineering Science |
| 巻 | 201 |
| DOI | |
| 出版物ステータス | Published - 2019 6 29 |
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ASJC Scopus subject areas
- Chemistry(all)
- Chemical Engineering(all)
- Industrial and Manufacturing Engineering
これを引用
1.5 Minute-synthesis of continuous graphene films by chemical vapor deposition on Cu foils rolled in three dimensions. / Nagai, Yukuya; Sugime, Hisashi; Noda, Suguru.
：: Chemical Engineering Science, 巻 201, 29.06.2019, p. 319-324.研究成果: Article
}
TY - JOUR
T1 - 1.5 Minute-synthesis of continuous graphene films by chemical vapor deposition on Cu foils rolled in three dimensions
AU - Nagai, Yukuya
AU - Sugime, Hisashi
AU - Noda, Suguru
PY - 2019/6/29
Y1 - 2019/6/29
N2 - We report a high-productivity chemical vapor deposition (CVD) process of graphene by extending the reaction field to three dimensions (3D) and shortening the CVD time to a few minutes. A large Cu foil (5 × 30 cm 2 ) is rolled up and set in a small reactor (3.4 cm in diameter), and a continuous graphene film is obtained uniformly in a short time (1.5 min) by using C 2 H 4 as a more reactive carbon source than the popular CH 4 . The graphene transferred onto a quartz glass showed optical transmittances of 94.8–96.7% (550 nm) with sheet resistances of 0.78–1.68 kΩ sq −1 (without doping) and 0.3 kΩ sq −1 (with doping by HNO 3 vapor). Compared with the previous reports for fast and/or large-scale CVD, our method realized similarly high productivity of 100 cm 2 min −1 based on the CVD time despite of the small reactor, and higher productivity of 0.03 cm 2 -graphene per cm 3 -reactor per minute based on the reactor volume and total time for high temperature processing (15 min for heating, 1 min for annealing, and 1.5 min for CVD). The knowledge obtained here on the CVD conditions and packing ratio of Cu foils (0.55 cm 2 per cm 3 -reactor) is reusable for designing large-scale graphene production processes.
AB - We report a high-productivity chemical vapor deposition (CVD) process of graphene by extending the reaction field to three dimensions (3D) and shortening the CVD time to a few minutes. A large Cu foil (5 × 30 cm 2 ) is rolled up and set in a small reactor (3.4 cm in diameter), and a continuous graphene film is obtained uniformly in a short time (1.5 min) by using C 2 H 4 as a more reactive carbon source than the popular CH 4 . The graphene transferred onto a quartz glass showed optical transmittances of 94.8–96.7% (550 nm) with sheet resistances of 0.78–1.68 kΩ sq −1 (without doping) and 0.3 kΩ sq −1 (with doping by HNO 3 vapor). Compared with the previous reports for fast and/or large-scale CVD, our method realized similarly high productivity of 100 cm 2 min −1 based on the CVD time despite of the small reactor, and higher productivity of 0.03 cm 2 -graphene per cm 3 -reactor per minute based on the reactor volume and total time for high temperature processing (15 min for heating, 1 min for annealing, and 1.5 min for CVD). The knowledge obtained here on the CVD conditions and packing ratio of Cu foils (0.55 cm 2 per cm 3 -reactor) is reusable for designing large-scale graphene production processes.
KW - Chemical vapor deposition
KW - Ethylene
KW - Graphene
KW - Productivity
KW - Short reaction time
KW - Three-dimensional reaction field
UR - http://www.scopus.com/inward/record.url?scp=85062592081&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85062592081&partnerID=8YFLogxK
U2 - 10.1016/j.ces.2019.02.038
DO - 10.1016/j.ces.2019.02.038
M3 - Article
VL - 201
SP - 319
EP - 324
JO - Chemical Engineering Science
JF - Chemical Engineering Science
SN - 0009-2509
ER -