3-D Assembly Methods to Fabricate Multi-Metal Electrodes Implanted PDMS Structures for Micro Flow Devices

Masanori Ishizuka, Masaaki Abe, Hiroaki Houjou, Jun Mizuno, Shuichi Shoji

研究成果: Article

1 被引用数 (Scopus)

抄録

Prototype of metal electrodes implanted PDMS microchannel to control the 3 D electric field or precise temperature and new fabrication method were proposed. Our tentative goal is to fabricate a PDMS microchannel which has vertical and horizontal electrodes pairs. Accurate angles of 90 degree between the each electrode are obtained. CYTOP back plates under the metal electrodes were employed due to the residual stress. The CYTOP was worked as the protection layer from photolithography process containing organic solvent. The proposed micro channel consists of the single electrode implanted PDMS substrate and three electrodes of upper and both side implanted cover PDMS structure. We develop novel assembly method starting with three electrodes installed planar PDMS in order to form the 3 D microstructures.

元の言語English
ページ(範囲)393-397
ページ数5
ジャーナルIEEJ Transactions on Sensors and Micromachines
125
発行部数9
DOI
出版物ステータスPublished - 2006

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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