A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications

Akiko Yuzawa, Ryunosuke Gando, Kei Masunishi, Etsuji Ogawa, Hiroki Hiraga, Yasushi Tomizawa, Tetsuro Itakura, Tamio Ikehashi

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a "Catch-and-Release (CR)" method. While CR enables drive power reduction and instant start-up, its application to multi-axis tuning-fork (TF) gyroscope is not straightforward, since the increased degrees-of-freedom is likely to induce hazardous beat during the free vibration. To prevent this, a pantograph structure is introduced, in which drive motion is constrained by fixed-length joints, thereby eliminating the spurious beat. The fabricated gyroscope shows 3-axis sensitivities of 0.3-0.6 aF/dps and <2% cross-axis sensitivities. The consecutive CR operation with a release DC voltage at 25 V and a high Q factor of 440k at 20 kHz of pantograph mode are confirmed.

本文言語English
ホスト出版物のタイトル2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
出版社Institute of Electrical and Electronics Engineers Inc.
ページ430-433
ページ数4
ISBN(電子版)9781728120072
DOI
出版ステータスPublished - 2019 6
イベント20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
継続期間: 2019 6 232019 6 27

出版物シリーズ

名前2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
国/地域Germany
CityBerlin
Period19/6/2319/6/27

ASJC Scopus subject areas

  • プロセス化学およびプロセス工学
  • 分光学
  • 電子工学および電気工学
  • 機械工学
  • 電子材料、光学材料、および磁性材料
  • 制御と最適化
  • 器械工学

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