A 32×32 two-dimensional photodetector array using a-Si pin photodiodes and poly-Si TFTs integrated on a transparent substrate

M. Okamura, K. Kimura, S. Shirai, N. Yamauchi

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

We have designed, fabricated, and characterized a 32×32 two-dimensional photodetector array using amorphous silicon (a-Si) pin photodiodes and polysilicon (poly-Si) TFTs integrated on a transparent substrate. This work demonstrates the feasibility of a light-transmitting two-dimensional photodetector array for use in parallel optoelectronic systems such as free-space photonic switching systems.

本文言語English
ホスト出版物のタイトル1992 International Technical Digest on Electron Devices Meeting, IEDM 1992
出版社Institute of Electrical and Electronics Engineers Inc.
ページ685-688
ページ数4
ISBN(電子版)0780308174
DOI
出版ステータスPublished - 1992 1 1
外部発表はい
イベント1992 International Technical Digest on Electron Devices Meeting, IEDM 1992 - San Francisco, United States
継続期間: 1992 12 131992 12 16

出版物シリーズ

名前Technical Digest - International Electron Devices Meeting, IEDM
1992-December
ISSN(印刷版)0163-1918

Conference

Conference1992 International Technical Digest on Electron Devices Meeting, IEDM 1992
CountryUnited States
CitySan Francisco
Period92/12/1392/12/16

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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