A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control

T. Ikehashi*, E. Ogawa, H. Yamazaki, T. Ohguro

*この研究の対応する著者

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

A 3V operation RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. Bending of the piezoelectric actuator is controlled by a lithographical pattern formed on top of the actuator. The hybrid actuation and the optimized bending enabled 2.6V pull-in voltage with the pull-out voltage as high as 2.0V. The measured capacitance ratio is 14.

本文言語English
ホスト出版物のタイトルTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ149-152
ページ数4
DOI
出版ステータスPublished - 2007 12 1
外部発表はい
イベント4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
継続期間: 2007 6 102007 6 14

出版物シリーズ

名前TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
国/地域France
CityLyon
Period07/6/1007/6/14

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学

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