A Catch-and-Release drive MEMS gyroscope with enhanced sensitivity by mode-matching

Ryunosuke Gando, Haruka Kubo, Kei Masunishi, Yasushi Tomizawa, Etsuji Ogawa, Shunta Maeda, Yohei Hatakeyama, Tetsuro Itakura, Tamio Ikehashi

研究成果: Conference contribution

6 被引用数 (Scopus)

抄録

This paper presents a novel MEMS gyroscope that employs intermittent free vibration and mode matching. An intermittent operation is realized by a 'Catch-and-Release (CR)' technique, which enables significant reduction of the drive power. Sensitivities of the mode-matching and mode-split conditions are investigated by electrostatically tuning the sense-mode frequency. A sensitivity as high as 2.14 mV/dps, 52 times higher than the mode-split case, is obtained when the drive and sense frequency difference Δ is reduced to 50 Hz. Optimization for mode matching and quadrature nulling is also demonstrated.

本文言語English
ホスト出版物のタイトル4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ページ50-53
ページ数4
ISBN(電子版)9781509032334
DOI
出版ステータスPublished - 2017 5月 30
外部発表はい
イベント4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Kauai, United States
継続期間: 2017 3月 272017 3月 30

出版物シリーズ

名前4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings

Conference

Conference4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017
国/地域United States
CityKauai
Period17/3/2717/3/30

ASJC Scopus subject areas

  • 器械工学

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