A combined top-down and bottom-up approach to fabricate silica films with bimodal porosity

Kazuya Ijichi, Ayumu Fukuoka, Atsushi Shimojima, Masakazu Sugiyama, Tatsuya Okubo

研究成果: Article査読

9 被引用数 (Scopus)

抄録

We report a method to fabricate silica films with bimodal porosity based on the surfactant-directed self-assembly process followed by post-treatment with reactive ion etching (RIE). By RIE of a surfactant-templated mesoporous silica film with a 3D hexagonal structure, vertically-etched pores with the size of several tens of nanometers and the depth of ca. 60 nm are generated, while the original caged mesopores (ca. 5 nm in size) are still retained in the unetched parts of the film. Pre-treatment of the mesoporous silica film by wet-etching to expose the pores on the surface, followed by sputter deposition of a Pt layer for partial masking, is crucial for the anisotropic etching of the film. Such a combined top-down and bottom up approach offers an opportunity to fabricate silica films with hierarchical pore architectures.

本文言語English
ページ(範囲)828-831
ページ数4
ジャーナルMaterials Letters
65
5
DOI
出版ステータスPublished - 2011 3 15
外部発表はい

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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