TY - JOUR
T1 - A creep-immune electrostatic actuator for RF-MEMS tunable capacitor
AU - Ogawa, Etsuji
AU - Ikehashi, Tamio
AU - Saito, Tomohiro
AU - Yamazaki, Hiroaki
AU - Masunishi, Kei
AU - Tomizawa, Yasushi
AU - Ohguro, Tatsuya
AU - Sugizaki, Yoshiaki
AU - Toyoshima, Yoshiaki
AU - Shibata, Hideki
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2011/10
Y1 - 2011/10
N2 - A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.
AB - A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.
KW - Brittle material
KW - Creep
KW - Electrostatic actuator
KW - RF-MEMS
KW - Tunable capacitor
UR - http://www.scopus.com/inward/record.url?scp=80052034190&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80052034190&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2011.04.014
DO - 10.1016/j.sna.2011.04.014
M3 - Article
AN - SCOPUS:80052034190
VL - 169
SP - 373
EP - 377
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
SN - 0924-4247
IS - 2
ER -