A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

Etsuji Ogawa; Tamio Ikehashi; Tomohiro Saito; Hiroaki Yamazaki; Kei Masunishi; Yasushi Tomizawa; Tatsuya Ohguro; Yoshiaki Sugizaki; Yoshiaki Toyoshima; Hideki Shibata

doi:10.1016/j.sna.2011.04.014

A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

Etsuji Ogawa^*, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Yoshiaki Toyoshima, Hideki Shibata

^*この研究の対応する著者

研究成果: Article › 査読

11 被引用数 (Scopus)

抄録

A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.

本文言語	English
ページ（範囲）	373-377
ページ数	5
ジャーナル	Sensors and Actuators, A: Physical
巻	169
号	2
DOI	https://doi.org/10.1016/j.sna.2011.04.014
出版ステータス	Published - 2011 10月
外部発表	はい

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
器械工学
凝縮系物理学
表面、皮膜および薄膜
金属および合金
電子工学および電気工学

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10.1016/j.sna.2011.04.014

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@article{6c317882566b4a1aa75246f141392131,

title = "A creep-immune electrostatic actuator for RF-MEMS tunable capacitor",

abstract = "A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.",

keywords = "Brittle material, Creep, Electrostatic actuator, RF-MEMS, Tunable capacitor",

author = "Etsuji Ogawa and Tamio Ikehashi and Tomohiro Saito and Hiroaki Yamazaki and Kei Masunishi and Yasushi Tomizawa and Tatsuya Ohguro and Yoshiaki Sugizaki and Yoshiaki Toyoshima and Hideki Shibata",

year = "2011",

month = oct,

doi = "10.1016/j.sna.2011.04.014",

language = "English",

volume = "169",

pages = "373--377",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

AU - Ogawa, Etsuji

AU - Ikehashi, Tamio

AU - Saito, Tomohiro

AU - Yamazaki, Hiroaki

AU - Masunishi, Kei

AU - Tomizawa, Yasushi

AU - Ohguro, Tatsuya

AU - Sugizaki, Yoshiaki

AU - Toyoshima, Yoshiaki

AU - Shibata, Hideki

PY - 2011/10

Y1 - 2011/10

N2 - A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.

AB - A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.

KW - Brittle material

KW - Creep

KW - Electrostatic actuator

KW - RF-MEMS

KW - Tunable capacitor

UR - http://www.scopus.com/inward/record.url?scp=80052034190&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80052034190&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2011.04.014

DO - 10.1016/j.sna.2011.04.014

M3 - Article

AN - SCOPUS:80052034190

VL - 169

SP - 373

EP - 377

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

IS - 2

ER -

A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

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