A disposable, dead volume-free and leak-free in-plane PDMS microvalve

Jeung Sang Go*, Shuichi Shoji


研究成果: Conference article査読

75 被引用数 (Scopus)


The align-less three-dimensional in-plane PDMS microvalve is presented. The device is entirely made from PDMS. The hemisphere with smooth surface ensures dead volume- and leak-free, which is formed by bulging of UV-curable glue. Also, the spin-coated PDMS membrane is bonded to the molded PDMS substrate for 3D structure fabrication indicating that align-less assembly is possible. In particular, the curing ratio, defined as the ratio of soft cure time and the full cure time of PDMS at the soft cure temperature, is for the first time introduced for PDMS-to-PDMS bonding. The best bonding judged from bonding feature and bonding strength is shown at the temperature of 50°C and 29min implying the curing ratio of 0.06. Finally, a membrane-inserted in-plane PDMS microvalve is fabricated and its performance is visually evaluated.

ジャーナルSensors and Actuators, A: Physical
出版ステータスPublished - 2004 9月 1
イベントSelected Papers from Transducers 03 - Boston, MA, United States
継続期間: 2003 6月 82003 6月 12

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学


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