A disposable, dead volume-free and leak-free monolithic PDMS microvalve

Jeung Sang Go, T. Yamazaki, M. Kanai, H. Sato, S. Kawakami, S. Shoji

研究成果: Conference contribution

12 被引用数 (Scopus)

抄録

A new fabrication method of a membrane-inserted pneumatically-driven microvalve is presented. The device is entirely made from PDMS. To ensure dead volume-free and leak-free, the valve chamber is formed with smooth surface using molding of UV-curable bond. Also, to place a PDMS membrane on the molded PDMS substrate, bonding with spin-coated PDMS membrane is performed, indicating to align-less assembly. As a reference of bonding characterization, the curing ratio, defined as the ratio of soft bake time and hard cure time of PDMS at the same soft cure temperature, is introduced. The best bonding feature is obtained at the curing ratio of 0.06. The maximum tensile bonding strength is examined. Finally, the performance of the membrane-inserted monolithic PDMS valve is tested.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
出版社Institute of Electrical and Electronics Engineers Inc.
ページ643-646
ページ数4
ISBN(電子版)0780377311, 9780780377318
DOI
出版ステータスPublished - 2003 1月 1
イベント12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
継続期間: 2003 6月 82003 6月 12

出版物シリーズ

名前TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
国/地域United States
CityBoston
Period03/6/803/6/12

ASJC Scopus subject areas

  • 電子工学および電気工学

フィンガープリント

「A disposable, dead volume-free and leak-free monolithic PDMS microvalve」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル