@inproceedings{f30ddf4939ba4e378583905721162ee8,
title = "A high power-handling RF MEMS tunable capacitor using quadruple series capacitor structure",
abstract = "This paper presents an RF MEMS tunable capacitor that achieves an excellent power-handling property with relatively low actuation voltage. The tunable capacitor consists of two fixed MIM (Metal-Insulator-Metal) capacitors and two MEMS capacitor elements, all connected in series. This quadruple series capacitor (QSC) structure enables reduction of the actuation voltage without sacrificing the power-handling capability, since the MIM capacitor reduces the RF voltage amplitude applied to the MEMS capacitors. The measured result demonstrates +36dBm hot-switching at 85°C with 21V pull-in voltage.",
keywords = "Hot-switching, Power-handling, RF MEMS, Tunable capacitor",
author = "Hiroaki Yamazaki and Tamio Ikehashi and Tomohiro Saito and Etsuji Ogawa and Takayuki Masunaga and Tatsuya Ohguro and Yoshiaki Sugizaki and Hideki Shibata",
year = "2010",
month = oct,
day = "15",
doi = "10.1109/MWSYM.2010.5518281",
language = "English",
isbn = "9781424477326",
series = "IEEE MTT-S International Microwave Symposium Digest",
pages = "1138--1141",
booktitle = "2010 IEEE MTT-S International Microwave Symposium, MTT 2010",
note = "2010 IEEE MTT-S International Microwave Symposium, MTT 2010 ; Conference date: 23-05-2010 Through 28-05-2010",
}