A high power-handling RF MEMS tunable capacitor using quadruple series capacitor structure

Hiroaki Yamazaki^*, Tamio Ikehashi, Tomohiro Saito, Etsuji Ogawa, Takayuki Masunaga, Tatsuya Ohguro, Yoshiaki Sugizaki, Hideki Shibata

^*この研究の対応する著者

研究成果: Conference contribution