A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium

Hiroaki Yamazaki, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi

研究成果: Conference contribution

1 引用 (Scopus)

抄録

We report on a novel Palladium (Pd)-based MEMS capacitive hydrogen gas sensor which has an 'inverted T-shaped' electrode and a 'ring-shaped palladium' layer that enable high sensitivity. Thanks to these structures, deformation of the membrane caused by hydrogen absorption can be efficiently transduced to the capacitance change. The capacitance change was found to be 3 times larger than that of the conventional structure. The prototype sensors were fabricated by a CMOS compatible process. The sensor operation was confirmed up to the lower explosive limit of 4%vol. hydrogen. We also show that the proposed sensor has a broad design window that attains high sensitivity.

元の言語English
ホスト出版物のタイトルTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
出版者Institute of Electrical and Electronics Engineers Inc.
ページ226-229
ページ数4
ISBN(電子版)9781538627310
DOI
出版物ステータスPublished - 2017 7 26
外部発表Yes
イベント19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
継続期間: 2017 6 182017 6 22

出版物シリーズ

名前TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Taiwan, Province of China
Kaohsiung
期間17/6/1817/6/22

Fingerprint

Palladium
microelectromechanical systems
MEMS
palladium
Hydrogen
Electrodes
electrodes
sensitivity
rings
sensors
Sensors
Capacitance
hydrogen
capacitance
Chemical sensors
Membranes
CMOS
prototypes
membranes
gases

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

これを引用

Yamazaki, H., Hayashi, Y., Masunishi, K., Ono, D., & Ikehashi, T. (2017). A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium. : TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 226-229). [7994029] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994029

A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium. / Yamazaki, Hiroaki; Hayashi, Yumi; Masunishi, Kei; Ono, Daiki; Ikehashi, Tamio.

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 226-229 7994029 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

研究成果: Conference contribution

Yamazaki, H, Hayashi, Y, Masunishi, K, Ono, D & Ikehashi, T 2017, A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium. : TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994029, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Institute of Electrical and Electronics Engineers Inc., pp. 226-229, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, Province of China, 17/6/18. https://doi.org/10.1109/TRANSDUCERS.2017.7994029
Yamazaki H, Hayashi Y, Masunishi K, Ono D, Ikehashi T. A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium. : TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc. 2017. p. 226-229. 7994029. (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/TRANSDUCERS.2017.7994029
Yamazaki, Hiroaki ; Hayashi, Yumi ; Masunishi, Kei ; Ono, Daiki ; Ikehashi, Tamio. / A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 226-229 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).
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AU - Ikehashi, Tamio

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N2 - We report on a novel Palladium (Pd)-based MEMS capacitive hydrogen gas sensor which has an 'inverted T-shaped' electrode and a 'ring-shaped palladium' layer that enable high sensitivity. Thanks to these structures, deformation of the membrane caused by hydrogen absorption can be efficiently transduced to the capacitance change. The capacitance change was found to be 3 times larger than that of the conventional structure. The prototype sensors were fabricated by a CMOS compatible process. The sensor operation was confirmed up to the lower explosive limit of 4%vol. hydrogen. We also show that the proposed sensor has a broad design window that attains high sensitivity.

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