A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium

Hiroaki Yamazaki, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

We report on a novel Palladium (Pd)-based MEMS capacitive hydrogen gas sensor which has an 'inverted T-shaped' electrode and a 'ring-shaped palladium' layer that enable high sensitivity. Thanks to these structures, deformation of the membrane caused by hydrogen absorption can be efficiently transduced to the capacitance change. The capacitance change was found to be 3 times larger than that of the conventional structure. The prototype sensors were fabricated by a CMOS compatible process. The sensor operation was confirmed up to the lower explosive limit of 4%vol. hydrogen. We also show that the proposed sensor has a broad design window that attains high sensitivity.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ226-229
ページ数4
ISBN(電子版)9781538627310
DOI
出版ステータスPublished - 2017 7 26
外部発表はい
イベント19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
継続期間: 2017 6 182017 6 22

出版物シリーズ

名前TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

フィンガープリント 「A high sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル